HiPIMS溅射制备高熵Hf-Zr-Ce-Y-O陶瓷薄膜的光学、机械和表面性能

{"title":"HiPIMS溅射制备高熵Hf-Zr-Ce-Y-O陶瓷薄膜的光学、机械和表面性能","authors":"S. Zenkin, A. Gaydaychuk, A. Mitulinsky, S. Linnik","doi":"10.1016/j.surfcoat.2022.128164","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":22031,"journal":{"name":"Surface and Coatings Technology","volume":"14 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Tailoring of optical, mechanical and surface properties of high-entropy Hf-Zr-Ce-Y-O ceramic thin films prepared by HiPIMS sputtering\",\"authors\":\"S. Zenkin, A. Gaydaychuk, A. Mitulinsky, S. Linnik\",\"doi\":\"10.1016/j.surfcoat.2022.128164\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":22031,\"journal\":{\"name\":\"Surface and Coatings Technology\",\"volume\":\"14 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Surface and Coatings Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/j.surfcoat.2022.128164\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface and Coatings Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/j.surfcoat.2022.128164","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}