Al1-xScxN薄膜的生长、性能及应用

2019 IEEE International Ultrasonics Symposium (IUS) Pub Date : 2019-10-01 DOI:10.1109/ULTSYM.2019.8926081

P. Muralt, V. Pashchenko, F. Parsapour, S. Mertin, B. Heinz, P. Nicolay

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引用次数: 1

摘要

AlN和ScN固溶体中增强压电性的发现无疑是压电MEMS中最重要的事件之一。与纯AlN相比，它在控制MEMS器件性能的许多指标上带来了关键因素2到3的改进。这篇文章的目的是对射频滤波器和传感器的处理、特性和应用的实际主题进行简要概述。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Growth, Properties, and Applications of Al1-xScxN Thin Films

The discovery of enhanced piezoelectricity in solid solutions of AlN and ScN is certainly one of the most important events in piezoelectric MEMS. As compared to pure AlN, it brought a crucial factor 2 to 3 improvement in a number of figures of merit governing the performance of MEMS devices. The aim of this contribution is to give a short overview on actual topics in processing, properties, and applications in RF filters and sensors.

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2019 IEEE International Ultrasonics Symposium (IUS)

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