声波压力传感器在TPMS中的应用比较

时间频率公报 Pub Date : 2015-04-12 DOI:10.1109/FCS.2015.7138824

M. Nagaraju, S. Sridaran, Andrew Lingley, J. Larson, B. Otis, R. Ruby

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引用次数: 7

摘要

研究并比较了不同面积瑞利兰姆波(RL)模式(S1模式)和FBAR谐振器的压力灵敏度。所研究的rl模式和FBAR谐振器分别工作在785MHz和628MHz。谐振器是在以氮化铝为压电层的释放膜上制备的。谐振器是密封的，整个制造过程使用标准的微加工技术。该装置具有15 - 80psi的压力灵敏度，适用于胎压监测系统(TPMS)。比较了不同面积谐振器的灵敏度。

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Comparison of acoustic wave pressure sensors for TPMS applications

We study and compare the pressure sensitivities of different area Rayleigh Lamb wave (RL) mode (S1 mode) and FBAR resonators. The studied RL-mode and FBAR resonators operate at 785MHz and 628MHz respectively. The resonators are fabricated on a released membrane with AlN as the piezoelectric layer. The resonators are hermetically sealed and the manufacturing process uses standard micromachining techniques throughout. The devices exhibit a pressure sensitivity over a range of 15 - 80psi, suitable for Tire Pressure Monitoring Systems (TPMS). The sensitivities of different area resonators are compared.

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时间频率公报

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