{"title":"由反应溅射ZnO制成的薄膜氧传感器","authors":"Uwe Lampe , Jörg Müller","doi":"10.1016/0250-6874(89)87034-9","DOIUrl":null,"url":null,"abstract":"<div><p>A thin-film zinc oxide chemical sensor with integrated heater and temperature sensor for the measurement of oxygen in water is described. The principle of operation and the fabrication steps are given. The sensor operates at a temperature near 300 °C. A simple reaction model explains the linear increase of the sensor resistivity with increasing oxygen concentration and the logarithmic time response. The measurement of the oxygen concentration in water is demonstrated with an arrangement incorporating a membrane and a low nitrogen flow.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"18 3","pages":"Pages 269-284"},"PeriodicalIF":0.0000,"publicationDate":"1989-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87034-9","citationCount":"65","resultStr":"{\"title\":\"Thin-film oxygen sensors made of reactively sputtered ZnO\",\"authors\":\"Uwe Lampe , Jörg Müller\",\"doi\":\"10.1016/0250-6874(89)87034-9\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>A thin-film zinc oxide chemical sensor with integrated heater and temperature sensor for the measurement of oxygen in water is described. The principle of operation and the fabrication steps are given. The sensor operates at a temperature near 300 °C. A simple reaction model explains the linear increase of the sensor resistivity with increasing oxygen concentration and the logarithmic time response. The measurement of the oxygen concentration in water is demonstrated with an arrangement incorporating a membrane and a low nitrogen flow.</p></div>\",\"PeriodicalId\":101159,\"journal\":{\"name\":\"Sensors and Actuators\",\"volume\":\"18 3\",\"pages\":\"Pages 269-284\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0250-6874(89)87034-9\",\"citationCount\":\"65\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0250687489870349\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870349","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Thin-film oxygen sensors made of reactively sputtered ZnO
A thin-film zinc oxide chemical sensor with integrated heater and temperature sensor for the measurement of oxygen in water is described. The principle of operation and the fabrication steps are given. The sensor operates at a temperature near 300 °C. A simple reaction model explains the linear increase of the sensor resistivity with increasing oxygen concentration and the logarithmic time response. The measurement of the oxygen concentration in water is demonstrated with an arrangement incorporating a membrane and a low nitrogen flow.
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