基于宽带测量样本数据的光学涂层溅射沉积监测算法

IF 0.58 Q3 Engineering

Journal of Applied and Industrial Mathematics Pub Date : 2023-11-04 DOI:10.1134/S1990478923030146

V. D. Shinkarev, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola

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引用次数: 0

摘要

基于对固定波长组的宽带测量样本数据的分析，我们考虑了一种用于监测光学涂层溅射沉积过程的算法。一方面，所考虑的算法使用宽带测量数据，这与仅使用一个固定波长的单色测量数据相比是一个优势，另一方面，与使用完整宽带测量数据的算法相比是快速的。已经证明，所提出的算法允许对沉积的多层光学涂层中的层厚度进行非常精确的估计。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Algorithm for Monitoring Optical Coating Sputter Deposition Based on Broadband Measurement Sample Data

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Algorithm for Monitoring Optical Coating Sputter Deposition Based on Broadband Measurement Sample Data

We consider an algorithm for monitoring the process of sputter deposition of optical coatings based on the analysis of sample data of broadband measurements for a fixed set of wavelengths. On the one hand, the considered algorithm uses broadband measurement data, which is an advantage compared to using only monochromatic measurement data for one fixed wavelength, and on the other hand, it is fast compared to algorithms that use complete broadband measurement data. It has been demonstrated that the proposed algorithm allows one to obtain fairly accurate estimates of the layer thicknesses in deposited multilayer optical coatings.

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来源期刊

Journal of Applied and Industrial Mathematics Engineering-Industrial and Manufacturing Engineering

CiteScore

1.00

自引率

0.00%

发文量

期刊介绍： Journal of Applied and Industrial Mathematics is a journal that publishes original and review articles containing theoretical results and those of interest for applications in various branches of industry. The journal topics include the qualitative theory of differential equations in application to mechanics, physics, chemistry, biology, technical and natural processes; mathematical modeling in mechanics, physics, engineering, chemistry, biology, ecology, medicine, etc.; control theory; discrete optimization; discrete structures and extremum problems; combinatorics; control and reliability of discrete circuits; mathematical programming; mathematical models and methods for making optimal decisions; models of theory of scheduling, location and replacement of equipment; modeling the control processes; development and analysis of algorithms; synthesis and complexity of control systems; automata theory; graph theory; game theory and its applications; coding theory; scheduling theory; and theory of circuits.