微电子成分材料中痕量铀和钍的测定

Journal of research of the National Bureau of Standards Pub Date : 1988-05-01 DOI:10.6028/jres.093.092

H. Saisho, M. Tanaka, K. Nakamura, E. Mori

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引用次数: 3

摘要

分析性质量控制*抽样有效方法统计*样本/数据管理责任*可追溯性*自动化- lims *数据术语和解释*内部质量控制*程序*准确性*精密度*设施/人员*外部质量控制*循环研究*认证统计过程控制*过程稳定性。纯度vs一致性

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Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials

Analytical quality control * Sampling ' Valid methods statistics * Sample/data management ' Accountability * Traceability * Automation-LIMS * Terminology and interpretation of datu * Internal quality control * Procedures * Accuracy * Precision * Facilities/personnel * External quality control * Round Robin Studies * Accreditation Statistical process control * Process stability . Purity vs consistency

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Journal of research of the National Bureau of Standards

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