超高灵敏度光学多环级联腔温度传感器

Shen San-min, Deng Jia-hao, Yan Shu-bin
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引用次数: 0

摘要

提出并演示了一种超小型集成光子十阶谐振器温度传感器,并采用先进的MEMS技术制造了一个硅环谐振器。温度变化是通过监测硅谐振腔的十阶谐振波长的位移来测量的,这种位移是由热光效应和热膨胀效应引起的。当波导宽度为450 nm时,获得的最佳灵敏度约为130 pm/°C,微环半径约为5 μm。同时,还报道了基于双赛道环的双通道传感器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optical Multi-ring Cascade Cavity Temperature Sensor with Ultra-High Sensitivity
An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.
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