{"title":"超高灵敏度光学多环级联腔温度传感器","authors":"Shen San-min, Deng Jia-hao, Yan Shu-bin","doi":"10.4172/2090-4886.1000155","DOIUrl":null,"url":null,"abstract":"An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.","PeriodicalId":91517,"journal":{"name":"International journal of sensor networks and data communications","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2018-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.4172/2090-4886.1000155","citationCount":"0","resultStr":"{\"title\":\"Optical Multi-ring Cascade Cavity Temperature Sensor with Ultra-High Sensitivity\",\"authors\":\"Shen San-min, Deng Jia-hao, Yan Shu-bin\",\"doi\":\"10.4172/2090-4886.1000155\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.\",\"PeriodicalId\":91517,\"journal\":{\"name\":\"International journal of sensor networks and data communications\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.4172/2090-4886.1000155\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International journal of sensor networks and data communications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.4172/2090-4886.1000155\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International journal of sensor networks and data communications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4172/2090-4886.1000155","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optical Multi-ring Cascade Cavity Temperature Sensor with Ultra-High Sensitivity
An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.