熔体中ZnO晶体生长的热力学分析

M. Asadian
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引用次数: 12

摘要

最近,在固态材料方面的努力包括开发能够生产大尺寸和高质量的基于器件应用的ZnO晶圆的技术。从高纯度熔体中生长出高质量的块状晶体。然而,ZnO的热化学性质(高熔点和高蒸气压)使得单晶的生长困难。热力学计算表明,如果使用合适的动态气氛成分,ZnO晶体可以从熔体中生长出来。通过向CO2大气中添加NO-NO2气体,可以满足随着温度升高对氧气的需求。在ZnO熔点处,Pt = 5 atm时CO2-NO-CO-NO2混合气体的氧分压达到PO2 = 0.29 atm。根据这一新的热力学结果,与纯CO2相比,可以在较低的总压下从熔体中生长出ZnO晶体。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Thermodynamic Analysis of ZnO Crystal Growth from the Melt
Recently, the efforts in solid-state materials include developing technologies capable of producing ZnO wafers in large dimensions and good quality based device applications. High quality bulk crystals are obtained by growing from high purity the melt. However, the thermochemical properties of ZnO (high melting point and high vapor pressure) make the growth of single crystals difficult. The thermodynamic calculations show that ZnO crystals can be grown from the melt if a suitable dynamic atmosphere composition is used. The oxygen requirement with increasing the temperature can be fulfilled by adding the NO-NO2 gases into the CO2 atmosphere. At ZnO melting point, the oxygen partial pressure of gas mixtures containing CO2-NO-CO-NO2 at Pt = 5 atm reaches to PO2 = 0.29 atm. According to this new thermodynamic result, it would be expected that ZnO crystal could be grown from the melt at lower total pressure comparing to pure CO2.
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