离子辅助沉积抗电磁干扰与抗反射复合薄膜的涂覆技术

Q4 Physics and Astronomy

光学技术 Pub Date : 2014-01-01 DOI:10.3788/GXJS20144001.0075

杨伟声 Yang Weisheng

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引用次数: 0

摘要

将两种物理性能完全不同的薄膜组合在k9玻璃基板上形成复合薄膜层，实现了抗电磁干扰和高透光性。技术性能指标:400nm-1100nm光平均透过率不小于90%。抗电磁干扰屏蔽面上的电阻值为4±0.5Ω/‰，达到良好的抗电磁干扰屏蔽效果。为满足技术性能要求，设计了一种由抗电磁干扰和减反射涂层组成的复合薄膜结构，并进行了涂层实验。实验结果表明，离子辅助沉积技术可以改善光学薄膜的微观结构，提高复合薄膜的光学性能、物理性能和耐久性。

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Coated technology on composite thin-film of anti-electromagnetic interference and anti-reflecting film by ion assisted deposition

Two kinds of thin-film with full different physic performances are combined together on K9glass substrate to form composite film layer,achieving anti-electromagnetic interference and high light-transmitting.Technical performance index:light-average transmissivity is not less than 90%in 400nm-1100nm.The resistance value on anti-electromagnetic interference shielding surface is 4±0.5Ω/口to achieve a good anti-electromagnetic interference shielding.A complex film construction composed of electromagnetic interference resistance and reducing reflecting coating is designed to meet the technical performance requirements and coating experiment is carried out.The experiment result shows that microstructure of optical thin film can be improved by ion assisted deposition technology to increase optical performance,physical performance and durability of complex thin film.

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来源期刊

光学技术 Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

0.60

自引率

0.00%

发文量

6699

期刊介绍：