塔尔博特地毯的单次曝光成像及微纳米图案探测器的分辨率表征

Q Physics and Astronomy
Hyun-su Kim, S. Danylyuk, W. Brocklesby, L. Juschkin
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引用次数: 3

摘要

在本文中,我们展示了一种自我成像技术,可以可视化周期性结构物体背后的纵向干涉图案,这通常被称为塔尔博特地毯。塔尔博特地毯由于干涉特征的尺度不断减小而引起人们的极大兴趣。我们通过实验证明,塔尔博特地毯可以在单一曝光配置中成像,揭示了多尺度特征的广谱。我们已经进行了严格的衍射模拟,表明塔尔博特地毯印花可以产生不断减少的结构,直到掩膜特征尺寸的限制。这表明,大尺度的图案掩模可以用于直接打印具有小尺度的特征。这种方法也适用于图像传感器和记录介质的表征
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Single Exposure Imaging of Talbot Carpets and Resolution Characterization of Detectors for Micro- and Nano- Patterns
In this paper, we demonstrate a self-imaging technique that can visualize longitudinal interference patterns behind periodically-structured objects, which is often referred to as Talbot carpet. Talbot carpet is of great interest due to ever-decreasing scale of interference features. We demonstrate experimentally that Talbot carpets can be imaged in a single exposure configuration revealing a broad spectrum of multi-scale features. We have performed rigorous diffraction simulations for showing that Talbot carpet print can produce ever-decreasing structures down to limits set by mask feature sizes. This demonstrates that large-scale pattern masks may be used for direct printing of features with substantially smaller scales. This approach is also useful for characterization of image sensors and recording media
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来源期刊
CiteScore
0.70
自引率
0.00%
发文量
0
审稿时长
2.3 months
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