电子束加热硅晶体生长体系中杂质源的减少

IF 0.3 4区 物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY
A. Kravtsov, J. Virbulis, A. Krauze
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引用次数: 1

摘要

采用电子束加热法对硅晶体生长过程中杂质的来源进行了研究。在电子枪和生长室之间放置了一个气体动力学窗口。还沿着坩埚放置了带正电的陷阱,以减少撞击腔室和坩埚的电子数量。共进行了5次实验:2次使用窗口,2次使用电荷陷阱,1次同时使用窗口和电荷陷阱。对所得样品的分析表明,气动力窗降低了熔体残留物中Al、Cu、Fe、Cr和O2的含量,实验中使用的捕集器降低了熔体残留物中Fe、Cr和Cu的含量。除Al外,所有杂质的含量均接近目标水平。铝杂质只来自于枪,但气体动力窗口不能完全消除它们。似乎铝杂质要么以气体携带的中性原子形式出现,要么以带正电的离子形式出现。为了减少这些杂质,提出了用磁场将铝流从光束中分离出来的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reduction of impurity sources in Si crystal growth system with electron gun beam heating
A new series of experiments was conducted to determine the source of impurities in the process of silicon crystal growth with electron beam heating. A gas-dynamic window was placed between the electron gun and growth chamber. Also positively-charged traps were placed along the crucible to reduce the number of electrons hitting the chamber and the crucible. Five experiments were conducted: two with the window, two with charge traps, and one with both the window and charge traps. The analysis of obtained samples showed that the gas-dynamic window decreases the content of Al, Cu, Fe, Cr and O2, and the trap, used in the experiments, decreases the content of Fe, Cr and Cu in residues of the melt. The content of all impurities, except Al, is close to the goal level. Al impurities come only from the gun, but the gas-dynamic window cannot eliminate them completely. It seems that Al impurities come either as neutral atoms carried by the gas or as positively charged ions. To reduce these impurities, a separation of the Al flow from the beam by the magnetic field is proposed.
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来源期刊
Lithuanian Journal of Physics
Lithuanian Journal of Physics 物理-物理:综合
CiteScore
0.90
自引率
16.70%
发文量
21
审稿时长
>12 weeks
期刊介绍: The main aim of the Lithuanian Journal of Physics is to reflect the most recent advances in various fields of theoretical, experimental, and applied physics, including: mathematical and computational physics; subatomic physics; atoms and molecules; chemical physics; electrodynamics and wave processes; nonlinear and coherent optics; spectroscopy.
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