硅晶体基座生长的建模

IF 0.3 4区 物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY
K. Surovovs, A. Kravtsov, J. Virbulis
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引用次数: 0

摘要

基座法是众所周知的浮动区法的替代方法,这两种方法都是通过高频电磁加热进行的。与浮动区方法不同,在基座方法中,从熔体向上拉出单晶。它允许一个降低料棒质量要求和简化过程控制,因为没有开放的熔化前。由于硅晶体的基座法在工业上尚未得到广泛应用,其发展需要大量的数值模拟。目前的工作描述了先前创建的数学模型在直径比目前可能在实验装置中更高的晶体以及锥体生长阶段的应用。补充自由表面加热,以防止熔体中心冻结在播种阶段,已添加在锥形阶段的开始。通过多组模拟,提出了锥体生长的最优加热控制方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modelling of the pedestal growth of silicon crystals
The pedestal method is an alternative to the well-known floating zone method, both of which are performed with high-frequency electromagnetic heating. Unlike the floating zone method, in the pedestal method a single crystal is pulled upwards from the melt. It allows one to lower feed rod quality requirements and simplify the process control due to the absence of open melting front. As the pedestal method has not been widely used in industry for silicon crystals, its development requires extensive numerical modelling. The present work describes application of the previously created mathematical model for crystals with diameters higher than it is currently possible in the experimental setup, as well as for the cone growth phase. Supplementary free surface heating, that prevents melt centre freezing during the seeding phase, has been added at the beginning of cone phase. After multiple sets of simulations, an optimal scheme of heating control for cone growth was proposed.
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来源期刊
Lithuanian Journal of Physics
Lithuanian Journal of Physics 物理-物理:综合
CiteScore
0.90
自引率
16.70%
发文量
21
审稿时长
>12 weeks
期刊介绍: The main aim of the Lithuanian Journal of Physics is to reflect the most recent advances in various fields of theoretical, experimental, and applied physics, including: mathematical and computational physics; subatomic physics; atoms and molecules; chemical physics; electrodynamics and wave processes; nonlinear and coherent optics; spectroscopy.
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