{"title":"混合集成硫系光子","authors":"Bin Zhang, Di Xia, Xin Zhao, Lei Wan, Zhaohui Li","doi":"10.37188/lam.2023.024","DOIUrl":null,"url":null,"abstract":"High-quality photonic materials are critical for promoting integrated photonic devices with broad bandwidths, high efficiencies, and flexibilities for high-volume chip-scale fabrication. Recently, we designed a home-developed chalcogenide glass (ChG)- Ge 25 Sb 10 S 65 (GeSbS) for optical information processing chips and systems, which featured an ultrabroad transmission window, a high Kerr nonlinearity and photoelastic coefficient, and compatibility with the photonic hybrid integration technology of silicon photonics. Chip-integrated GeSbS microresonators and microresonator arrays with high quality factors and lithographically controlled fine structures were fabricated using a modified nanofabrication process. Moreover, considering the high Kerr nonlinearity and photoelastic effect of ChGs, we realised a novel ChG hybrid integrated chip, inspired by recent advances in integrated soliton microcombs and acousto-optic (AO) modulators.","PeriodicalId":56519,"journal":{"name":"光:先进制造(英文)","volume":"35 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Hybrid-integrated chalcogenide photonics\",\"authors\":\"Bin Zhang, Di Xia, Xin Zhao, Lei Wan, Zhaohui Li\",\"doi\":\"10.37188/lam.2023.024\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High-quality photonic materials are critical for promoting integrated photonic devices with broad bandwidths, high efficiencies, and flexibilities for high-volume chip-scale fabrication. Recently, we designed a home-developed chalcogenide glass (ChG)- Ge 25 Sb 10 S 65 (GeSbS) for optical information processing chips and systems, which featured an ultrabroad transmission window, a high Kerr nonlinearity and photoelastic coefficient, and compatibility with the photonic hybrid integration technology of silicon photonics. Chip-integrated GeSbS microresonators and microresonator arrays with high quality factors and lithographically controlled fine structures were fabricated using a modified nanofabrication process. Moreover, considering the high Kerr nonlinearity and photoelastic effect of ChGs, we realised a novel ChG hybrid integrated chip, inspired by recent advances in integrated soliton microcombs and acousto-optic (AO) modulators.\",\"PeriodicalId\":56519,\"journal\":{\"name\":\"光:先进制造(英文)\",\"volume\":\"35 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"光:先进制造(英文)\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.37188/lam.2023.024\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"光:先进制造(英文)","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.37188/lam.2023.024","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
摘要
高质量的光子材料对于促进具有宽带、高效率和灵活性的集成光子器件的大规模芯片级制造至关重要。近年来,我们设计了一种国产的用于光学信息处理芯片和系统的硫系玻璃(ChG)- Ge 25 Sb 10 S 65 (GeSbS),该玻璃具有超远透射窗口、高克尔非线性和光弹性系数,并且与硅光子学的光子混合集成技术兼容。采用改进的纳米工艺制备了具有高质量因数和光刻控制精细结构的芯片集成GeSbS微谐振器和微谐振器阵列。此外,考虑到ChG的高克尔非线性和光弹性效应,我们实现了一种新的ChG混合集成芯片,灵感来自集成孤子微梳和声光(AO)调制器的最新进展。
High-quality photonic materials are critical for promoting integrated photonic devices with broad bandwidths, high efficiencies, and flexibilities for high-volume chip-scale fabrication. Recently, we designed a home-developed chalcogenide glass (ChG)- Ge 25 Sb 10 S 65 (GeSbS) for optical information processing chips and systems, which featured an ultrabroad transmission window, a high Kerr nonlinearity and photoelastic coefficient, and compatibility with the photonic hybrid integration technology of silicon photonics. Chip-integrated GeSbS microresonators and microresonator arrays with high quality factors and lithographically controlled fine structures were fabricated using a modified nanofabrication process. Moreover, considering the high Kerr nonlinearity and photoelastic effect of ChGs, we realised a novel ChG hybrid integrated chip, inspired by recent advances in integrated soliton microcombs and acousto-optic (AO) modulators.