Phase microscopy and surface profilometry by digital holography

Quantitative phase microscopy by digital holography is a good candidate for high-speed, high precision profilometry. Multi-wavelength optical phase unwrapping avoids difficulties of numerical unwrapping methods, and can generate surface topographic images with large axial range and high axial resolution. But the large axial range is accompanied by proportionately large noise. An iterative process utilizing holograms acquired with a series of wavelengths is shown to be effective in reducing the noise to a few micrometers even over the axial range of several millimeters. An alternate approach with shifting of illumination angle, instead of using multiple laser sources, provides multiple effective wavelengths from a single laser, greatly simplifying the system complexity and providing great flexibility in the wavelength selection. Experiments are performed demonstrating the basic processes of multi-wavelength digital holography (MWDH) and multi-angle digital holography (MADH). Example images are presented for surface profiles of various types of surface structures. The methods have potential for versatile, high performance surface profilometry, with compact optical system and straightforward processing algorithms.