利用回收材料研制真空基板固定系统的旋涂设备

IF 0.5 4区化学 Q4 CHEMISTRY, MULTIDISCIPLINARY

Quimica Nova Pub Date : 2023-06-26 DOI:10.21577/0100-4042.20230022

Antonio Chepluki, T. Frizon, Igor Villares De Carvalho

{"title":"利用回收材料研制真空基板固定系统的旋涂设备","authors":"Antonio Chepluki, T. Frizon, Igor Villares De Carvalho","doi":"10.21577/0100-4042.20230022","DOIUrl":null,"url":null,"abstract":"DEVELOPMENT OF A SPIN COATING EQUIPMENT WITH A VACUUM SUBSTRATE FIXING SYSTEM USING REUSED MATERIALS. This work presents the development of a low-cost spin coater for thin film deposition as an alternative to commercial equipment that have high acquisition cost. The proposed spin coater uses a brushless motor taken from an unused hard disk, which is activated through the association of an electronic speed controller (ESC) and an Arduino microcontroller. During deposition, the rotating substrate is attached with a vacuum clamping system. For the control, the system uses a Hall effect sensor to read the engine speed. The rotation readings performed by the equipment sensor were validated with a tachometer. Finally, TiO2 films were deposited on glass substrates with ITO (Indium Tin Oxide) and characterized by UV-Vis spectroscopy to obtain the transmittance of the films at different rotation speeds.","PeriodicalId":49641,"journal":{"name":"Quimica Nova","volume":null,"pages":null},"PeriodicalIF":0.5000,"publicationDate":"2023-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"DESENVOLVIMENTO DE UM EQUIPAMENTO DE SPIN COATING COM SISTEMA DE FIXAÇÃO DE SUBSTRATO A VÁCUO EMPREGANDO MATERIAIS REUTILIZADOS\",\"authors\":\"Antonio Chepluki, T. Frizon, Igor Villares De Carvalho\",\"doi\":\"10.21577/0100-4042.20230022\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"DEVELOPMENT OF A SPIN COATING EQUIPMENT WITH A VACUUM SUBSTRATE FIXING SYSTEM USING REUSED MATERIALS. This work presents the development of a low-cost spin coater for thin film deposition as an alternative to commercial equipment that have high acquisition cost. The proposed spin coater uses a brushless motor taken from an unused hard disk, which is activated through the association of an electronic speed controller (ESC) and an Arduino microcontroller. During deposition, the rotating substrate is attached with a vacuum clamping system. For the control, the system uses a Hall effect sensor to read the engine speed. The rotation readings performed by the equipment sensor were validated with a tachometer. Finally, TiO2 films were deposited on glass substrates with ITO (Indium Tin Oxide) and characterized by UV-Vis spectroscopy to obtain the transmittance of the films at different rotation speeds.\",\"PeriodicalId\":49641,\"journal\":{\"name\":\"Quimica Nova\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2023-06-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Quimica Nova\",\"FirstCategoryId\":\"92\",\"ListUrlMain\":\"https://doi.org/10.21577/0100-4042.20230022\",\"RegionNum\":4,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Quimica Nova","FirstCategoryId":"92","ListUrlMain":"https://doi.org/10.21577/0100-4042.20230022","RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

利用重复利用材料的真空基板固定旋转镀膜设备的研制。这项工作提出了一种低成本的薄膜沉积旋转镀膜机的发展，作为高购置成本的商用设备的替代方案。提出的旋转涂布机使用从未使用的硬盘中取出的无刷电机，该电机通过电子速度控制器(ESC)和Arduino微控制器的关联激活。在沉积过程中，旋转基板与真空夹紧系统相连。对于控制，系统使用霍尔效应传感器读取发动机转速。设备传感器执行的旋转读数用转速表进行验证。最后，用ITO(铟锡氧化物)将TiO2薄膜沉积在玻璃衬底上，并用紫外可见光谱对其进行表征，得到薄膜在不同转速下的透过率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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DESENVOLVIMENTO DE UM EQUIPAMENTO DE SPIN COATING COM SISTEMA DE FIXAÇÃO DE SUBSTRATO A VÁCUO EMPREGANDO MATERIAIS REUTILIZADOS

DEVELOPMENT OF A SPIN COATING EQUIPMENT WITH A VACUUM SUBSTRATE FIXING SYSTEM USING REUSED MATERIALS. This work presents the development of a low-cost spin coater for thin film deposition as an alternative to commercial equipment that have high acquisition cost. The proposed spin coater uses a brushless motor taken from an unused hard disk, which is activated through the association of an electronic speed controller (ESC) and an Arduino microcontroller. During deposition, the rotating substrate is attached with a vacuum clamping system. For the control, the system uses a Hall effect sensor to read the engine speed. The rotation readings performed by the equipment sensor were validated with a tachometer. Finally, TiO2 films were deposited on glass substrates with ITO (Indium Tin Oxide) and characterized by UV-Vis spectroscopy to obtain the transmittance of the films at different rotation speeds.

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来源期刊

Quimica Nova 化学-化学综合

CiteScore

1.60

自引率

12.50%

发文量

审稿时长

2-4 weeks

期刊介绍： Química Nova publishes in portuguese, spanish and english, original research articles, revisions, technical notes and articles about education in chemistry. All the manuscripts submitted to QN are evaluated by, at least, two reviewers (from Brazil and abroad) of recognized expertise in the field of chemistry involved in the manuscript. The Editorial Council can be eventually asked to review manuscripts. Editors are responsible for the final edition of QN.