IMPROVING CHARACTERISTICS OF ZINC OXIDE TRANSPARENT ELECTRODES

. The influence of the composition of the reagent flow on the formation conditions and the structure of ZnO-based layers is studied. It is shown that a key reserve in increasing the electrical conductivity and mobility of charge carriers of Ga-doped ZnO transparent electrodes is to increase the structural perfection of the layers. Analysis of the obtained results shows that an increase in the partial pressure of metal vapors in the gas phase entails a corresponding increase in the mobility of the components and an increase in the crystalline perfection of the synthesized polycrystalline layers.