{"title":"磁致伸缩薄膜驱动器的研制","authors":"T. Honda;Y. Hayashi;M. Yamaguchi;K.I. Arai","doi":"10.1109/TJMJ.1994.4565953","DOIUrl":null,"url":null,"abstract":"We fabricated two kinds of cantilever actuator and a traveling machine by using magnetostrictive Tb-Fe and Sm-Fe thin films on a polyimide substrate. No power supply cable is required for their actuation, because they are driven by an external magnetic field. The magnetostrictive cantilevers exhibited a large deflection in low magnetic fields. Their unique characteristics suggest that magnetostriction can be used as the driving mechanism of microactuators.","PeriodicalId":100647,"journal":{"name":"IEEE Translation Journal on Magnetics in Japan","volume":"9 6","pages":"27-32"},"PeriodicalIF":0.0000,"publicationDate":"1994-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565953","citationCount":"6","resultStr":"{\"title\":\"Fabrication of Thin-Film Actuators Using Magnetostriction\",\"authors\":\"T. Honda;Y. Hayashi;M. Yamaguchi;K.I. Arai\",\"doi\":\"10.1109/TJMJ.1994.4565953\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We fabricated two kinds of cantilever actuator and a traveling machine by using magnetostrictive Tb-Fe and Sm-Fe thin films on a polyimide substrate. No power supply cable is required for their actuation, because they are driven by an external magnetic field. The magnetostrictive cantilevers exhibited a large deflection in low magnetic fields. Their unique characteristics suggest that magnetostriction can be used as the driving mechanism of microactuators.\",\"PeriodicalId\":100647,\"journal\":{\"name\":\"IEEE Translation Journal on Magnetics in Japan\",\"volume\":\"9 6\",\"pages\":\"27-32\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565953\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Translation Journal on Magnetics in Japan\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/4565953/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Translation Journal on Magnetics in Japan","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/4565953/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of Thin-Film Actuators Using Magnetostriction
We fabricated two kinds of cantilever actuator and a traveling machine by using magnetostrictive Tb-Fe and Sm-Fe thin films on a polyimide substrate. No power supply cable is required for their actuation, because they are driven by an external magnetic field. The magnetostrictive cantilevers exhibited a large deflection in low magnetic fields. Their unique characteristics suggest that magnetostriction can be used as the driving mechanism of microactuators.
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