{"title":"准分子激光烧蚀制备Fe-N薄膜","authors":"T. Yoshitake;M. Ohkoshi;K. Tsushima","doi":"10.1109/TJMJ.1994.4565972","DOIUrl":null,"url":null,"abstract":"Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N\n<sub>2</sub>\n pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N\n<sub>2</sub>\n gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 μs. The velocity of the Fe radicals depends on the N\n<sub>2</sub>\n pressure, which contributes to formation of the Fe-N film.","PeriodicalId":100647,"journal":{"name":"IEEE Translation Journal on Magnetics in Japan","volume":"9 6","pages":"146-152"},"PeriodicalIF":0.0000,"publicationDate":"1994-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565972","citationCount":"4","resultStr":"{\"title\":\"Fe-N Thin Films Prepared by Excimer Laser Ablation\",\"authors\":\"T. Yoshitake;M. Ohkoshi;K. Tsushima\",\"doi\":\"10.1109/TJMJ.1994.4565972\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N\\n<sub>2</sub>\\n pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N\\n<sub>2</sub>\\n gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 μs. The velocity of the Fe radicals depends on the N\\n<sub>2</sub>\\n pressure, which contributes to formation of the Fe-N film.\",\"PeriodicalId\":100647,\"journal\":{\"name\":\"IEEE Translation Journal on Magnetics in Japan\",\"volume\":\"9 6\",\"pages\":\"146-152\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565972\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Translation Journal on Magnetics in Japan\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/4565972/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Translation Journal on Magnetics in Japan","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/4565972/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fe-N Thin Films Prepared by Excimer Laser Ablation
Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N
2
pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N
2
gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 μs. The velocity of the Fe radicals depends on the N
2
pressure, which contributes to formation of the Fe-N film.
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