气溶胶光度计与光散射空气粒子计数器(LSAPC)检测已安装过滤系统泄漏方法的比较

Q4 Engineering
B. Thaveau, J. Vanhee
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引用次数: 0

摘要

洁净室和洁净区安装的过滤系统泄漏试验方法在ISO 14644-3,洁净室和相关受控环境-第3部分:试验方法中有描述。ISO 14644-3中的部分方法改编自est - rp - cc034.4[美国伊利诺斯州肖姆堡:环境科学与技术研究所],该研究所提供了一套推荐的程序,用于在现场(现场)使用气溶胶光度计测试方法和光散射空气悬浮粒子计数器(LSAPC)测试方法进行HEPA和ULPA过滤器的泄漏测试。通过验证安装过程中没有旁路泄漏,确认最终高效空气过滤器系统安装正确,过滤器无缺陷(过滤介质、框架、密封件、过滤器组框架的小孔和其他损坏)。本研究对气溶胶光度计法和LSAPC法进行了比较。本研究的测试包括在过滤系统中制造人工泄漏,使用气溶胶光度计和LSAPC测量上游和下游浓度,并比较过滤器泄漏渗透结果。对安装终端面板过滤系统的泄漏扫描测试程序(静态测量)和安装在管道或空气处理机组(AHU)的大气流箱式过滤器的总体泄漏评估程序(总体泄漏测试)进行了对比测试。在实验误差范围内,气溶胶光度计和LSAPC对滤光片泄漏的测量结果相似。泄漏扫描试验(静态测量)的对比表明,当空气流速为1立方英尺/分钟(CFM) (28.3 l/min)时,LSAPC通道≥0.3 μm的穿透量计算结果与泄漏水平为上游浓度> 0.01%时气溶胶光度计测量的穿透量非常相似。总泄漏试验对比结果表明,对于粒径≥0.3 μm的滤料,无论LSAPC取样速率为1 CFM (28.3 l/min)还是50 l/min,在测量不确定度范围内,经人工标定泄漏物稀释后得到的总渗透值是相同的。提出了几项建议。特别是,对于安装在管道或AHU中过滤器功能至关重要的过滤器,建议使用泄漏扫描测试方法,在过滤器下游的平面上使用网格采样方法(由客户和供应商商定)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comparison of the Aerosol Photometer and Light Scattering Airborne Particle Counter (LSAPC) Methods for Installed Filter System Leak Testing
The installed filter system leak test method for cleanrooms and clean zones is described in ISO 14644-3, Cleanrooms and associated controlled environments—Part 3: Test method. Portions of the methods in ISO 14644-3 were adapted from IEST-RP-CC034.4[Schaumburg, Illinois, US: Institute of Environmental Science and Technology], which provides a set of recommended procedures for leak testing HEPA and ULPA filters in situ (in the field) with the aerosol photometer test method and the light scattering airborne particle counter (LSAPC) test method. Leak testing is performed to confirm that the final high efficiency air filter system is properly installed by verifying the absence of bypass leakage in the installation, and that the filters are free of defects (small holes and other damage in the filter medium, frame, seal and leaks in the filter bank framework). This study was conducted to compare the aerosol photometer and LSAPC methods. Testing in the study consisted of creating artificial leaks in the filter system, measuring the upstream and downstream concentrations with the aerosol photometer and with the LSAPC, and comparing the filter leak penetration results. Comparison testing was applied to the procedure for the installed terminal panel filter system leakage scan test (stationary measurement) and the procedure for evaluating overall leakage of high-airflow box-type filters mounted in a duct or air-handling unit (AHU) (overall leakage test). It was found that the aerosol photometer and the LSAPC gave similar results for filter leakage within experimental error. The comparison of the leakage scan tests (stationary measurement) showed that the penetration calculated for the channel ≥ 0.3 μm of the LSAPC with an air flow rate of 1cu ft/min (CFM) (28.3 l/min) was very similar to the penetration measured with the aerosol photometer for a leakage level >0.01 % of the upstream concentration. The comparison result of the overall leakage test showed that overall total penetration values, obtained after dilution of artificial calibrated leaks in the filter media, were identical, within the measurement uncertainty, for particles ≥0.3 μm whether the sampling rate of the LSAPC was 1 CFM (28.3 l/min) or 50 l/min. Several recommendations are provided. In particular, for filters mounted in a duct or AHU where the filter function is critical, the recommended method is the leakage scan test method, using a grid sampling method in a plane downstream of the filter (as agreed between customer and supplier).
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来源期刊
Journal of the IEST
Journal of the IEST Engineering-Safety, Risk, Reliability and Quality
CiteScore
0.40
自引率
0.00%
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期刊介绍: The Journal of the IEST is an official publication of the Institute of Environmental Sciences and Technology and is of archival quality and noncommercial in nature. It was established to advance knowledge through technical articles selected by peer review, and has been published for over 50 years as a benefit to IEST members and the technical community at large as as a permanent record of progress in the science and technology of the environmental sciences
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