一种基于聚酰亚胺的超薄芯片封装新技术

W. Christiaens, E. Bosman, J. Vanfleteren
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引用次数: 65

摘要

如今,柔性材料已经被用作电子组装的基板。许多安装元件可以集成在柔性聚酰亚胺(PI)衬底上。将组件集成到flex中的非常有趣的优点是紧凑性和增强的灵活性;不仅互连,而且组件本身也可以具有机械柔性。本文描述了一种基于PI的嵌入技术,用于在两个自旋PI层之间集成超薄硅片,即超薄芯片封装(UTCP)。本文讨论了UTCP生产的不同工艺步骤,并给出了用该技术实现的互连测试结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
UTCP: A Novel Polyimide-Based Ultra-Thin Chip Packaging Technology
Flexible materials, today, are being used already as base substrates for electronic assembly. A lot of mounted components could be integrated in flexible polyimide (PI) substrates. Very interesting advantages of integrating components into the flex are compactness and enhanced flexibility; not only the interconnection but also the components themselves can be mechanically flexible. This paper describes a PI-based embedding technology for integrating very thin silicon chips in between two spin-on PI layers, the ultra-thin chip package (UTCP). This paper discusses the different process steps in the UTCP production and also presents the interconnection test results realized with this technology.
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