基于线性编码器的低频惯性传感器

IF 6.7 3区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal of Optomechatronics Pub Date : 2015-12-01 DOI:10.1080/15599612.2016.1217109

S. Hellegouarch, Lionel Fueyo Roza, K. Artoos, P. Lambert, C. Collette

{"title":"基于线性编码器的低频惯性传感器","authors":"S. Hellegouarch, Lionel Fueyo Roza, K. Artoos, P. Lambert, C. Collette","doi":"10.1080/15599612.2016.1217109","DOIUrl":null,"url":null,"abstract":"ABSTRACT In this article, we present a novel concept of inertial sensor, based on a linear encoder. Compared to other interferometric sensors, the encoder is much more easy to mount, and the calibration more stable. A prototype has been built and validated experimentally by comparison with a commercial seismometer. It has a resolution of about 10 pm/√Hz. In order to further improve the resolution, two concepts of mechanical amplifiers have been studied and compared. One of them is shown to be extremely promising, provided that the amplifier does not stiffen the sensor.","PeriodicalId":50296,"journal":{"name":"International Journal of Optomechatronics","volume":"10 1","pages":"120 - 129"},"PeriodicalIF":6.7000,"publicationDate":"2015-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1080/15599612.2016.1217109","citationCount":"2","resultStr":"{\"title\":\"Linear encoder based low frequency inertial sensor\",\"authors\":\"S. Hellegouarch, Lionel Fueyo Roza, K. Artoos, P. Lambert, C. Collette\",\"doi\":\"10.1080/15599612.2016.1217109\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"ABSTRACT In this article, we present a novel concept of inertial sensor, based on a linear encoder. Compared to other interferometric sensors, the encoder is much more easy to mount, and the calibration more stable. A prototype has been built and validated experimentally by comparison with a commercial seismometer. It has a resolution of about 10 pm/√Hz. In order to further improve the resolution, two concepts of mechanical amplifiers have been studied and compared. One of them is shown to be extremely promising, provided that the amplifier does not stiffen the sensor.\",\"PeriodicalId\":50296,\"journal\":{\"name\":\"International Journal of Optomechatronics\",\"volume\":\"10 1\",\"pages\":\"120 - 129\"},\"PeriodicalIF\":6.7000,\"publicationDate\":\"2015-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1080/15599612.2016.1217109\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Optomechatronics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1080/15599612.2016.1217109\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Optomechatronics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1080/15599612.2016.1217109","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 2

摘要

本文提出了一种基于线性编码器的惯性传感器的新概念。与其他干涉传感器相比，编码器更容易安装，校准更稳定。建立了一个原型，并通过与商用地震仪的比较进行了实验验证。它的分辨率约为10 pm/√Hz。为了进一步提高分辨率，对两种机械放大器的概念进行了研究和比较。其中一个被证明是非常有前途的，只要放大器不使传感器变硬。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Linear encoder based low frequency inertial sensor

ABSTRACT In this article, we present a novel concept of inertial sensor, based on a linear encoder. Compared to other interferometric sensors, the encoder is much more easy to mount, and the calibration more stable. A prototype has been built and validated experimentally by comparison with a commercial seismometer. It has a resolution of about 10 pm/√Hz. In order to further improve the resolution, two concepts of mechanical amplifiers have been studied and compared. One of them is shown to be extremely promising, provided that the amplifier does not stiffen the sensor.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

International Journal of Optomechatronics 工程技术-工程：电子与电气

CiteScore

9.30

自引率

0.00%

发文量

审稿时长

3 months

期刊介绍： International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)