融合光学成像和分类与扫描探针光刻的石墨烯无电阻加工

IF 6.7 3区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal of Optomechatronics Pub Date : 2016-08-02 DOI:10.1080/15599612.2016.1217107

S. Zimmermann, Alexander van Duellen, M. Wieghaus, S. A. Garnica Barragán, S. Fatikow

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引用次数: 2

摘要

基于抗蚀剂的光刻技术广泛应用于石墨烯的加工。这些抗蚀剂可能会留下残留物，导致寄生效应，从而恶化石墨烯的预期性能。本文提出了一种基于原位视觉控制的无电阻石墨烯机器人加工实验装置。提出了一种鲁棒的石墨烯检测和分类方法，该方法利用高分辨率光学显微镜提供的视觉反馈进行多次图像处理操作。检测到的石墨烯薄片可以使用基于扫描探针的光刻工艺进行修改，例如机械和偏置辅助方法，这些方法与原位光学图像直接相关。讨论了该过程的结果以及进一步的应用场景。

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Resist-free processing of graphene merging optical imaging and classification with scanning probe lithography

ABSTRACT Resist based lithographical techniques are widely applied for graphene processing. These resists can leave residues leading to parasitic effects that deteriorate the desired properties of graphene. This paper presents an experimental setup tailored for resist-free robotic processing of graphene with in-situ vision based control. A robust graphene detection and classification approach is presented applying multiple image processing operations of the visual feedback provided by a high-resolution light microscope. Detected graphene flakes can be modified using scanning probe based lithographical processes, such as mechanical and bias-assisted approaches, that are directly linked to the in-situ optical images. The results of this process are discussed with respect to further application scenarios.

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来源期刊

International Journal of Optomechatronics 工程技术-工程：电子与电气

CiteScore

9.30

自引率

0.00%

发文量

审稿时长

3 months

期刊介绍： International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)