集成微加热器的高q微谐振器谐振波长的片上调谐

IF 6.7 3区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal of Optomechatronics Pub Date : 2014-11-18 DOI:10.1080/15599612.2015.1034905

Jialei Tang, Jintian Lin, Jiangxin Song, Z. Fang, Min Wang, Y. Liao, L. Qiao, Ya Cheng

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引用次数: 11

摘要

我们报道了一种高质量(高q)因子与片上微加热器集成的微环形谐振器的制造。微谐振器和微加热器均采用飞秒激光三维微加工技术制造。微加热器位于距离微谐振器约200 μ m的地方，占地面积为200 μ m × 400 μ m。通过改变施加在微加热器上的电压，实现了微谐振器中谐振波长的调谐。集成芯片的响应时间小于10秒。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater

We report on fabrication of a microtoroid resonator of a high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3-D) micromachining. The microheater, which is located about 200 µm away from the microresonator, has a footprint size of 200 µm × 400 µm. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The response time of the integrated chip is less than 10 seconds.

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来源期刊

International Journal of Optomechatronics 工程技术-工程：电子与电气

CiteScore

9.30

自引率

0.00%

发文量

审稿时长

3 months

期刊介绍： International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)