斜基底沉积制备YBCO涂层导体及其表征

B. Ma, U. Balachandran, Yongli Xu, R. Bhattacharya
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引用次数: 2

摘要

倾斜衬底沉积(ISD)是快速制备高质量YBCO涂层导体模板层的有效方法。在卷筒对卷筒系统中,我们通过电子束蒸发在柔性金属带上以2-10 nm·s−1的快速沉积速率沉积了双轴纹理的ISD - MgO薄膜。采用脉冲激光沉积(PLD)法制备了锶钌氧化物(SRO)缓冲膜和YBCO薄膜。使用配备gadd(一般区域检测衍射系统)的布鲁克D8 DISCOVER,通过X射线衍射对一米长的ISD - MgO磁带进行了极图分析。ISD - MgO薄膜的c轴偏离衬底法线。在倾角为35°的样品上,通过对MgO(002)衍射进行φ扫描,观察到半峰全宽(FWHM)约为10°。原子力显微镜测量的表面形貌显示ISD - MgO薄膜呈屋顶瓦状结构。通过使用SRO缓冲液,在YBCO薄膜的双轴排列中沉积…
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Fabrication and Characterization of YBCO Coated Conductors by Inclined Substrate Deposition
Inclined substrate deposition (ISD) is an effective method for rapid fabrication of high‐quality template layers for YBCO‐coated conductors. We have deposited biaxially textured ISD‐MgO films on flexible metallic tapes in a reel‐to‐reel system by electron‐beam evaporation at rapid deposition rates, 2–10 nm⋅s−1. Strontium ruthenium oxide (SRO) buffer and YBCO films were grown by pulsed laser deposition (PLD). Pole figure analysis of a meter‐long ISD‐MgO tape was carried out by X‐ray diffraction using a Bruker’s D8 DISCOVER equipped with GADDS (general area detection diffraction system). The c‐axis of the ISD‐MgO film was tilted away from substrate normal. A full‐width at half maximum (FWHM) of ≈10° was observed from the φ‐scan of the MgO (002) diffraction measured on samples deposited with 35° inclination angle. Surface morphology measured by atomic force microscopy revealed a roof‐tile shaped structure for the ISD‐MgO films. Through the use of the SRO buffer, biaxial alignment in the YBCO film deposited o...
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