Roughness of Polished Surfaces of Optoelectronic Components Made of Polymeric Optical Materials

As established from the results of studying the mechanism of nanorelief formation of the treated surface during polishing of polymer optical materials by means of dispersed systems based on micro- and nanoparticle polishing powders, roughness parameters Ra, Rq, and R_max increase linearly with an increase in the size of the sludge particles and decrease with an increase in the transfer energy. It is shown that they substantially increase with a decrease in the spectral separation between the processed material and the polishing powder particle and are extremely dependent on the dielectric constant differences between the processed material, the polishing powder, and the dispersed system. It is found that the roughness parameters of the treated surface decrease exponentially with an increase in the frequency index of Förster resonance energy transfer (FRET) efficiency and increase linearly with an increase in the time index of FRET efficiency. In the case of an increase in the Q factor of the resonator formed by the surfaces of the processed material and the polishing tool, the roughness parameters of the polished surfaces of parts made of polymeric optical materials increase linearly.