Ti掺杂对射频磁控溅射法制备inox基薄膜晶体管结构无序性的影响

{"title":"Ti掺杂对射频磁控溅射法制备inox基薄膜晶体管结构无序性的影响","authors":"S. Aikawa","doi":"10.1007/S13319-017-0147-6","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":38420,"journal":{"name":"3D Research","volume":"8 1","pages":"1-8"},"PeriodicalIF":0.0000,"publicationDate":"2017-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1007/S13319-017-0147-6","citationCount":"2","resultStr":"{\"title\":\"Effect of Ti Doping to Maintain Structural Disorder in InOx-Based Thin-Film Transistors Fabricated by RF Magnetron Sputtering\",\"authors\":\"S. Aikawa\",\"doi\":\"10.1007/S13319-017-0147-6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":38420,\"journal\":{\"name\":\"3D Research\",\"volume\":\"8 1\",\"pages\":\"1-8\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-09-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1007/S13319-017-0147-6\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"3D Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/S13319-017-0147-6\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"3D Research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/S13319-017-0147-6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"Engineering","Score":null,"Total":0}