{"title":"干涉增强技术在自吸收薄膜热红外探测器中的应用","authors":"K.C. Liddiard","doi":"10.1016/0020-0891(93)90070-N","DOIUrl":null,"url":null,"abstract":"<div><p>Uncooled thermal IR detectors require a suitable absorbing mechanism in order to achieve efficient radiation capture. For bulk detector materials such as ferroelectric ceramics this mechanism may be a broad-band absorber in the form of a metallic black layer, or a thin-film optical interference filter tuned for maximum absorption at the desired wavelength, deposited onto the surface of the detector.</p><p>A thin metal film having a sheet resistance of 189 Ω per square can absorb 50% of incident radiation, and is employed in the metal film resistance bolometer detector and Golay cell. In this paper an interferometric technique for thin film thermal detectors is described, whereby a thermally sensitive material in the form of a semiconductor or dielectric layer becomes an integral component of a 3-layer absorber stack. The theory of this absorber structure is reviewed and compared with experimental data. It is shown that an effective absorption of 90% can be achieved over the waveband 8–13μm for a blackbody radiation source at 300 K temperature.</p></div>","PeriodicalId":81524,"journal":{"name":"Infrared physics","volume":"34 4","pages":"Pages 379-387"},"PeriodicalIF":0.0000,"publicationDate":"1993-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0020-0891(93)90070-N","citationCount":"71","resultStr":"{\"title\":\"Application of interferometric enhancement to self-absorbing thin film thermal IR detectors\",\"authors\":\"K.C. Liddiard\",\"doi\":\"10.1016/0020-0891(93)90070-N\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Uncooled thermal IR detectors require a suitable absorbing mechanism in order to achieve efficient radiation capture. For bulk detector materials such as ferroelectric ceramics this mechanism may be a broad-band absorber in the form of a metallic black layer, or a thin-film optical interference filter tuned for maximum absorption at the desired wavelength, deposited onto the surface of the detector.</p><p>A thin metal film having a sheet resistance of 189 Ω per square can absorb 50% of incident radiation, and is employed in the metal film resistance bolometer detector and Golay cell. In this paper an interferometric technique for thin film thermal detectors is described, whereby a thermally sensitive material in the form of a semiconductor or dielectric layer becomes an integral component of a 3-layer absorber stack. The theory of this absorber structure is reviewed and compared with experimental data. It is shown that an effective absorption of 90% can be achieved over the waveband 8–13μm for a blackbody radiation source at 300 K temperature.</p></div>\",\"PeriodicalId\":81524,\"journal\":{\"name\":\"Infrared physics\",\"volume\":\"34 4\",\"pages\":\"Pages 379-387\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0020-0891(93)90070-N\",\"citationCount\":\"71\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Infrared physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/002008919390070N\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Infrared physics","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/002008919390070N","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Application of interferometric enhancement to self-absorbing thin film thermal IR detectors
Uncooled thermal IR detectors require a suitable absorbing mechanism in order to achieve efficient radiation capture. For bulk detector materials such as ferroelectric ceramics this mechanism may be a broad-band absorber in the form of a metallic black layer, or a thin-film optical interference filter tuned for maximum absorption at the desired wavelength, deposited onto the surface of the detector.
A thin metal film having a sheet resistance of 189 Ω per square can absorb 50% of incident radiation, and is employed in the metal film resistance bolometer detector and Golay cell. In this paper an interferometric technique for thin film thermal detectors is described, whereby a thermally sensitive material in the form of a semiconductor or dielectric layer becomes an integral component of a 3-layer absorber stack. The theory of this absorber structure is reviewed and compared with experimental data. It is shown that an effective absorption of 90% can be achieved over the waveband 8–13μm for a blackbody radiation source at 300 K temperature.