一种在室温下测定混合焦平面阵列中集成铟凹凸触点产率的方法

R.K. Bhan, S.K. Lomash, K.C. Chhabra
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引用次数: 1

摘要

提出了一种测定混合焦平面阵列中红外感光芯片与硅读出芯片之间铟凸点集成产率的简便电学方法。在我们的案例中,红外光敏芯片由一个16 × 16 HgCdTe (MCT)光伏(PV)阵列组成,读出芯片是一个16 × 16硅ccd多路复用器(MUX)。但是,该方法可以用于更大的数组大小。该方法可测定室温下的积分产率。此外,不需要在杜瓦瓶中真空密封混合FPA,也不需要在77 K下进行测试来确定产量。所提出的方法在像素对像素的基础上验证了MCT PV二极管与其相应的CCD MUX输入扩散之间的电连通性。在室温下对示波器上整个阵列的读数进行简单检查,由检测器启动,通过CCD MUX,用于确定在铟碰撞集成后,有多少MCT PV二极管成功地连接到相应的CCD MUX像素。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A method for determining the yield of indium bump contacts for integration in hybrid focal plane arrays at room temperature

A simple electrical method for determining the yield of indium bump integration between the infrared photosensing chip and the silicon readout chip in hybrid focal plane arrays (FPAs) is proposed. In our case, the IR photosensing chip consists of a 16 × 16 HgCdTe (MCT) photovoltaic (PV) array and the readout chip is a 16 × 16 silicon-CCD multiplexer (MUX). However, the method can be used for even larger array sizes. The method allows one to determine the yield of integration at room temperature. In addition, it does not necessitate the vacuum sealing of hybrid FPA in the dewar and subsequent testing at 77 K for determining this yield. The proposed method essentially verifies the electrical connectivity between the MCT PV diodes and their corresponding input diffusions in the CCD MUX on pixel-to-pixel basis. A simple examination of the readout of the whole array on the oscilloscope at room temperature, initiated at the detector and through CCD MUX is used for determining exactly how many MCT PV diodes have been joined successfully to their corresponding CCD MUX pixels after indium bump integration.

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