James P. Lodge Jr
{"title":"半导体制造中的危害评估与控制技术","authors":"James P. Lodge Jr","doi":"10.1016/0004-6981(89)90288-6","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":100138,"journal":{"name":"Atmospheric Environment (1967)","volume":"23 11","pages":"Page 2636"},"PeriodicalIF":0.0000,"publicationDate":"1989-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0004-6981(89)90288-6","citationCount":"11","resultStr":"{\"title\":\"Hazard assessment and control technology in semiconductor manufacturing\",\"authors\":\"James P. Lodge Jr\",\"doi\":\"10.1016/0004-6981(89)90288-6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":100138,\"journal\":{\"name\":\"Atmospheric Environment (1967)\",\"volume\":\"23 11\",\"pages\":\"Page 2636\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0004-6981(89)90288-6\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Atmospheric Environment (1967)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0004698189902886\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Atmospheric Environment (1967)","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0004698189902886","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 11