共溅射制备gd2o3掺杂HfO2高k薄膜及其性能

Q2 Materials Science

稀有金属 Pub Date : 2011-11-16 DOI:10.1007/S12598-011-0364-Z

Xiaona Wang, Xinqiang Zhang, Y. Xiong, Jun Du, M. Yang, Lei Wang

引用次数: 6

摘要

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication and properties of Gd2O3-doped HfO2 high k film by Co-sputtering

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来源期刊

稀有金属 Materials Science-Metals and Alloys

CiteScore

2.20

自引率

0.00%

发文量

7881

期刊介绍： Chinese Journal of Rare Metals is acomprehensive journal, published monthly in Chinese, administrated by China Association for Science and Technology, and sponsored by The Nonferrous Metals Society of China and General Research Institute forNonferrous Metals. Academician HailiTuis the Editor-in-Chief.It is incorporated by Chinese Core Journals, source of Chinese scientific and technical papers, source of Chinese Science Citation Database, source of Chinese Physics Literature Database and Chinese Academic Journals (CD).[...] It covers alloy processing, mineral processing, smelting, physical and chemical analysis of rare metals, precious metals, rare earth metals and non-ferrous metal materials such as nickel, cobalt. Additionally, the research, development and application of superconducting materials, semiconductor materials, composite materials, ceramic materials, nano materials, magnetic materials and other materials are also reported.The journal serves for research institutions,enterprises and institutions of higher education as well as science and technology personnel infields of rare and nonferrous metals,metallurgy,chemical industry,petroleum geology,energy,aerospace and so on.