4‐3:300mm CMOS平台上的MircoLED显示器-串扰和光学解耦

Digest of technical papers. SID International Symposium Pub Date : 2023-06-01 DOI:10.1002/sdtp.16478

S. Steudel, J. Vertommen, E. Le Boulbar, Giuseppe Buscemi, Lars Bach, S. Van Huylenbroeck, Shuo Kang, J. de Vos, A. Miller, H. Osman, K. Rebibis

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摘要

我们已经将microLED集成到一个300mm的CMOS平台上，该平台的ppi为9150ppi，亮度为bbb1mnits。本文展示了光解耦优化对光串扰和效率提取的影响。通过实现晶圆级光学，我们实现了相邻像素之间的串扰减少超过20dB，其中>20%的光在与波导光学相关的+/‐20度的APEX角内。

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4‐3: MircoLED display on 300mm CMOS platform – crosstalk and optical outcoupling

We have implemented microLED integration into a 300mm CMOS platform with 9150ppi and brightness > 1Mnits. Here we show the impact of light outcoupling optimization on optical crosstalk and efficiency extraction. By implementing wafer level optics we achieve a crosstalk reduction of more than 20dB between neighboring pixels with >20% of the light within the APEX angle of +/‐20deg relevant for waveguide optics.

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Digest of technical papers. SID International Symposium

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