从STEM到4D STEM:使用混合像素检测器的超快衍射映射

D. Stroppa, M. Meffert, C. Hoermann, P. Zambon, Darya Bachevskaya, Hervé Remigy, C. Schulze-Briese, L. Piazza
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引用次数: 3

摘要

4D扫描透射电子显微镜(STEM)技术在电子显微镜表征方法中越来越受到重视,因为它们提供了一个从整体上改进样品信息检索的视角。为了使4D STEM实验与传统STEM图像采集一样可行,需要用像素化检测器以快速帧速率、足够的灵敏度捕捉单电子撞击和高动态范围记录衍射图案。本文介绍了混合像素检测器技术的最新发展,该技术现在允许使用与传统STEM成像类似的设置进行4D STEM实验,像素采集时间低于10µs。介绍了虚拟STEM探测器和晶体相位定向映射的应用实例。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
From STEM to 4D STEM: Ultrafast Diffraction Mapping with a Hybrid-Pixel Detector
4D scanning transmission electron microscope (STEM) techniques have been increasingly featured among the electron microscopy characterization approaches, as they provide a perspective of improved information retrieval from samples overall. To make 4D STEM experiments as viable as conventional STEM image acquisition, the recording of diffraction patterns with a pixelated detector at fast frame rates, sufficient sensitivity to capture single electron hits, and high dynamic range is necessary. This paper addresses the recent development in hybrid-pixel detector technology that now allows 4D STEM experiments with a similar setup to conventional STEM imaging with pixel collection time under 10 µs. Application examples on virtual STEM detectors and crystal phase-orientation mapping are presented.
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