真空计量及其对研究和工业的影响

IF 0.4 Q4 ENGINEERING, MECHANICAL

Vakuum in Forschung und Praxis Pub Date : 2023-02-01 DOI:10.1002/vipr.2023700114

K. Jousten

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引用次数: 0

摘要

通过精确的真空测量，可以控制工业过程，确保科学和研究中许多实验所需的环境条件，并支持真空设备制造商和用户之间的商业关系。真空计量的主要任务，即真空测量科学，是为SI提供真空测量的可追溯性。近年来，通过分压分析和放气率测量对真空进行表征，真空测量的动力学成为真空计量的一个问题。

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Vacuum metrology and its impact on research and industry

By accurate vacuum measurement, it is possible to control processes in industry, to ensure the necessary environmental conditions for many experiments in science and research and to support the commercial relationship between manufacturers and users of vacuum equipment. The main task of vacuum metrology, the science of vacuum measurement, is to provide traceability of vacuum measurements to the SI. In recent years, also the characterization of vacuum by partial pressure analysis and outgassing rate measurement, and the dynamics of vacuum measurement became an issue for vacuum metrology.

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来源期刊

Vakuum in Forschung und Praxis ENGINEERING, MECHANICAL-

CiteScore

0.30

自引率

0.00%

发文量

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