扫描透射电子显微镜正确完成

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引用次数: 0

摘要

4D扫描透射电子显微镜(STEM)测量的性能、可用性甚至可用性在历史上都因在最初并非为此目的设计的(S)TEM柱上缺乏4D-STEM组件的集成而受到损害。本文介绍了TESCAN TENSOR,这是世界上第一台专用的4D-STEM仪器,用于功能材料、薄膜、天然和合成晶体的纳米级形态、化学和结构特性的多峰表征,具有卓越的4D-SEM性能和前所未有的可用性。4D-STEM是一种用于纳米级、多峰表征材料特性(如形态、化学和结构)的显微镜方法。在STEM数据集中的每个像素处,TENSOR快速获取完全同步的衍射图案和能量色散光谱(EDS)。衍射和光谱数据共同封装了电子束-样品相互作用的全貌,从中可以得出广泛的材料特性。本文将回顾4D-STEM的分析应用,并讨论新的4D-STEM如何满足这些要求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Scanning Transmission Electron Microscopy Done Right
Performance, usability, and even availability of 4D-scanning transmission electron microscopy (STEM) measurements have historically been compromised by the lack of integration of 4D-STEM components on (S)TEM columns that were not originally designed for this purpose. This article introduces TESCAN TENSOR, the world’s first dedicated 4D-STEM instrument for multimodal characterization of nanoscale morphological, chemical, and structural properties of functional materials, thin films, and natural and synthetic crystals with stand-out 4D-STEM performance and unprecedented usability. 4D-STEM is the microscopy method of choice for nanoscale, multimodal characterization of material properties such as morphology, chemistry, and structure. At each pixel in the STEM dataset, the TENSOR rapidly acquires a diffraction pattern and an energy dispersive spectroscopy (EDS) spectrum that are perfectly synchronized. Together, diffraction and spectroscopy data encapsulate the full picture of electron beam–specimen interaction, from which a wide range of material properties can be derived. This article will review analytical 4D-STEM applications and discuss how the new 4D-STEM meets these requirements.
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