微结构柔性压阻传感器的激光直写与表征

IF 15.3 1区物理与天体物理 Q1 OPTICS

Opto-Electronic Advances Pub Date : 2021-04-06 DOI:10.29026/OEA.2021.200061

Zhang Chenying, Wei Zhou, Da Geng, Cheng Bai, Weida Li, Songyue Chen, Tao Luo, Lifeng Qin, Xie Yu

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引用次数: 18

摘要

高粘度功能材料和固体材料在柔性压力传感器中受到越来越多的关注，而在最常用的成型方法中，这些材料是不够的。本文提出了激光直写（LDW）方法，在质量分数为8%MWCNTs的PDMS/MWCNTs复合材料上制备具有微结构的柔性压阻传感器。通过控制激光能量，可以获得不同几何形状的微结构，这对传感器的性能有很大影响。随后，在f＝40kHz和v＝150mm·s-1的参数下制备了具有优异性能的弯曲微通道。该传感器具有连续的多线性灵敏度、21.80%kPa-1的超高原始灵敏度、超过20kPa的宽检测范围、约100ms的响应/恢复时间和超过1000次的良好循环稳定性。此外，当施加微小的压力（30Pa的花生）时，可以观察到明显的阻力变化。最后，柔性压阻传感器可用于LED亮度控制、脉冲检测和语音识别。

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Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures

Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors, which are inadequate in the most used molding method. Herein, laser direct writing (LDW) method is proposed to fabricate flexible piezoresistive sensors with microstructures on PDMS/ MWCNTs composites with an 8% MWCNTs mass fraction. By controlling laser energy, microstructures with different geometries can be obtained, which significantly impacts the performances of the sensors. Subsequently, curved microcones with excellent performance are fabricated under parameters of f = 40 kHz and v = 150 mm·s-1. The sensor exhibits continuous multi-linear sensitivity, ultrahigh original sensitivity of 21.80 % kPa-1, wide detection range of over 20 kPa, response/recovery time of ~100 ms and good cycle stability for more than 1000 times. Besides, obvious resistance variation can be observed when tiny pressure (a peanut of 30 Pa) is applied. Finally, the flexible piezoresistive sensor can be applied for LED brightness controlling, pulse detection and voice recognition.

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来源期刊

Opto-Electronic Advances OPTICS-

CiteScore

19.30

自引率

7.10%

发文量

128

期刊介绍： Opto-Electronic Advances (OEA) is a distinguished scientific journal that has made significant strides since its inception in March 2018. Here's a collated summary of its key features and accomplishments: Impact Factor and Ranking: OEA boasts an impressive Impact Factor of 14.1, which positions it within the Q1 quartiles of the Optics category. This high ranking indicates that the journal is among the top 25% of its field in terms of citation impact. Open Access and Peer Review: As an open access journal, OEA ensures that research findings are freely available to the global scientific community, promoting wider dissemination and collaboration. It upholds rigorous academic standards through a peer review process, ensuring the quality and integrity of the published research. Database Indexing: OEA's content is indexed in several prestigious databases, including the Science Citation Index (SCI), Engineering Index (EI), Scopus, Chemical Abstracts (CA), and the Index to Chinese Periodical Articles (ICI). This broad indexing facilitates easy access to the journal's articles by researchers worldwide. Scope and Purpose: OEA is committed to serving as a platform for the exchange of knowledge through the publication of high-quality empirical and theoretical research papers. It covers a wide range of topics within the broad area of optics, photonics, and optoelectronics, catering to researchers, academicians, professionals, practitioners, and students alike.