湿度对溶液法制备In2O3薄膜晶体管电性能和偏置稳定性的影响

IF 2.2 4区材料科学 Q2 MATERIALS SCIENCE, CERAMICS

Journal of Asian Ceramic Societies Pub Date : 2022-07-03 DOI:10.1080/21870764.2022.2112373

Yanan Ding, Yajie Ren, Zifan Wang, Haiyang Qiu, F. Shan, Guoxia Liu

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引用次数: 3

摘要

存储环境中的相对湿度(RH)对薄膜晶体管(TFTs)的电性能影响很大，对于半导体制造和器件封装至关重要。在这项工作中，制备了溶液处理的氧化铟(In2O3) TFT，并研究了该器件在不同RH条件下的电性能。研究发现，阈值电压(Vth)和In2O3 TFT的迁移率对相对湿度在23% ~ 85%范围内有明显的响应。阐述了湿度对电性能影响的内在机理，这是由于被吸收的水分子的“施主效应”。除了对Vth和迁移率的影响外，RH对TFT的电稳定性也有显著影响。实验结果表明，在RH <50%的条件下，在施加正偏置应力的情况下，In2O3 TFT具有良好的稳定性。

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Humidity effect on electrical performance and bias stability of solution-processed In2O3 thin film transistor

ABSTRACT Relative humidity (RH) in storage environment has a great impact on the electrical performance of thin film transistors (TFTs), and the RH is critical for semiconductor manufacturing and device packaging. In this work, solution-processed indium oxide (In2O3) TFT is fabricated, and the electrical performance of the device is investigated after being exposed to various RH conditions. It is found that the threshold voltage (Vth) and the mobility of In2O3 TFT exhibit clear responses to the RH ranging from 23% to 85%. The inherent mechanism about the humidity effect on the electrical performance is elaborated, and this is due to the “donor effect” from the absorbed water molecules. In addition to the effect on Vth and mobility, RH also exhibits a significant effect on the electrical stability of the TFT. The experimental result indicates that the In2O3 TFT exposed to RH <50% exhibits excellent stability with an applied positive bias stressing for 2000s.

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来源期刊

Journal of Asian Ceramic Societies Materials Science-Ceramics and Composites

CiteScore

5.00

自引率

4.30%

发文量

审稿时长

10 weeks

期刊介绍： The Journal of Asian Ceramic Societies is an open access journal publishing papers documenting original research and reviews covering all aspects of science and technology of Ceramics, Glasses, Composites, and related materials. These papers include experimental and theoretical aspects emphasizing basic science, processing, microstructure, characteristics, and functionality of ceramic materials. The journal publishes high quality full papers, letters for rapid publication, and in-depth review articles. All papers are subjected to a fair peer-review process.