量子电子用双浮动材料GaN-HEMT非对称凹陷门的定性分析与进展

Q4 Engineering
Y. Gowthami, B.Balaji, K. Srinivasa Rao
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引用次数: 0

摘要

利用Silvaco Atlas TCAD工具模拟并提取了氮化铝(AlN)间隔层、氮化镓(GaN)帽层、前Pi栅极(FG)和后Pi栅极(BG)、二氧化铪(HfO2)、氧化铝(Al2O3)、氮化硅(Si3N4)等高K介电材料对氮化镓/氮化铝(AlGaN/GaN)、6nm(纳米)技术异质结高电子迁移率晶体管(HEMT)的影响。研究了Al2O3和Si3N4等高K介电材料对GaN HEMT提出的重要性。氮化镓、氮化镓帽层和高K介电材料相互层叠,以克服传统晶体管的缺陷,如表面缺陷、电子散射和电子迁移率低。采用Pi型栅极克服了热电子效应。因此,通过优化HEMT结构,将某些器件的能力转化为能力。建立了GaN帽层、多栅极(FG &BG)和高K介电材料对直流特性和射频特性的依赖关系。进一步比较了单门(SG)钝化HEMT、双门(DG)钝化HEMT、双门三齿(DGT)钝化HEMT、高介电常数前Pi门(FG)和后Pi门(BG)纳米线HEMT。观察到漏极电流(Ion)增加了5.92(A/mm),漏极电流(Ioff)降低了5.54E-13 (A),跨导(Gm)为3.71(S/mm),漏极电导(Gd)为1.769(S/mm),截止频率(fT)为743 GHz,最大振荡频率(Fmax)为765 GHz,最小阈值电压(Vth)为-4.5V,导通电阻(Ron)为0.40(欧姆)。这些突出的特点和晶体管结构提出了HEMT和材料所涉及的应用于下一代高速GHz频率的应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Qualitative Analysis & Advancement of Asymmetric Recessed Gates with Dual Floating Material GaN HEMT for Quantum Electronics
The Impact of Aluminium nitride (AlN) Spacer, Gallium Nitride (GaN) Cap Layer, Front Pi Gate (FG) and Back Pi Gate(BG),  High K dielectric material such as Hafnium dioxide(HfO2), Aluminium Oxide (Al2O3), Silicon nitride  (Si3N4) on Aluminium  Galium Nitride/ Gallium Nitride (AlGaN/GaN), Heterojunction High Electron Mobility Transistor (HEMT) of 6nm(nanometer) technology is simulated and extracted the results using the Silvaco Atlas TCAD tool. The importance of High K dielectric materials like Al2O3 and Si3N4 are studied for the proposal of GaN HEMT. AlN, GaN Cap Layers, and High K Dielectric material are layered one on another  to overcome the conventional transistor draw backs  like surface defects, scattering of the electron, and less mobility of electron. Hot electron effect is overcome by Pi type gate. Therefore, by optimizing the HEMT structure the abilities for certain devices are converted to abilities. The dependency on DC characteristics and RF characteristics due to GaN Cap Layers, Multi gate (FG &BG), and High K Dielectric material is established. Further Compared Single Gate (SG) Passivated HEMT, Double Gate (DG) Passivated HEMT, Double Gate  Triple(DGT) Tooth Passivated HEMT, High K Dielectric Front Pi Gate (FG) and Back Pi Gate  (BG) Nanowire HEMT. It is observed that there is an increased Drain   Current (Ion) of 5.92(A/mm), low Leakage current(Ioff)  5.54E-13 (A) of   Transconductance (Gm) of  3.71(S/mm), Drain Conductance (Gd)  of 1.769(S/mm), Cutoff frequency(fT) of   743 GHz  Maximum Oscillation frequency (Fmax) 765 GHz, Minimum Threshold Voltage (Vth)  of   -4.5V, On Resistance (Ron)of 0.40(Ohms) at Vgs =0V. These outstanding characteristics     and transistor structure of proposed HEMT and materials involved to apply for upcoming generation High-speed GHz frequency applications.
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来源期刊
Journal of Integrated Circuits and Systems
Journal of Integrated Circuits and Systems Engineering-Electrical and Electronic Engineering
CiteScore
0.90
自引率
0.00%
发文量
39
期刊介绍: This journal will present state-of-art papers on Integrated Circuits and Systems. It is an effort of both Brazilian Microelectronics Society - SBMicro and Brazilian Computer Society - SBC to create a new scientific journal covering Process and Materials, Device and Characterization, Design, Test and CAD of Integrated Circuits and Systems. The Journal of Integrated Circuits and Systems is published through Special Issues on subjects to be defined by the Editorial Board. Special issues will publish selected papers from both Brazilian Societies annual conferences, SBCCI - Symposium on Integrated Circuits and Systems and SBMicro - Symposium on Microelectronics Technology and Devices.
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