用于自动纳米操作的AFM图像中基于深度学习的纳米线检测

IF 3.5 3区 工程技术 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Huitian Bai, Sen Wu
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引用次数: 12

摘要

基于原子力显微镜(AFM)的纳米操作已被证明是一种将各种纳米颗粒组装成复杂图案和器件的可能方法。为了实现高效和全自动的纳米操作,必须精确和自动地识别基材上的纳米颗粒。本文研究了一种基于深度学习技术的柔性纳米线自动检测方法。采用基于You Only Look Once version 3 (YOLOv3)和全卷积网络(FCN)的实例分割网络对AFM图像中所有可移动纳米线进行分割。结合后续图像形态学和拟合算法,可以在高抽象水平上检测纳米线的姿态和位置。得益于这些算法,我们的程序能够以纳米分辨率自动检测不同形态的纳米线,并且在测试数据集中具有90%以上的可靠性。与现有检测方法相比,检测结果受图像复杂度的影响较小,具有较好的鲁棒性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Deep-learning-based nanowire detection in AFM images for automated nanomanipulation
Atomic force microscope (AFM)-based nanomanipulation has been proved to be a possible method for assembling various nanoparticles into complex patterns and devices. To achieve efficient and fully automated nanomanipulation, nanoparticles on the substrate must be identified precisely and automatically. This work focuses on an autodetection method for flexible nanowires using a deep learning technique. An instance segmentation network based on You Only Look Once version 3 (YOLOv3) and a fully convolutional network (FCN) is applied to segment all movable nanowires in AFM images. Combined with follow-up image morphology and fitting algorithms, this enables detection of postures and positions of nanowires at a high abstraction level. Benefitting from these algorithms, our program is able to automatically detect nanowires of different morphologies with nanometer resolution and has over 90% reliability in the testing dataset. The detection results are less affected by image complexity than the results of existing methods and demonstrate the good robustness of this algorithm.
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来源期刊
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering Engineering-Industrial and Manufacturing Engineering
CiteScore
6.50
自引率
0.00%
发文量
1379
审稿时长
14 weeks
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