集成质量传感系统的小型差示扫描量热计:第一步

IF 0.8 Q4 INSTRUMENTS & INSTRUMENTATION
Johanna Distler, T. Wöhrl, R. Werner, Michaela Gerlach, M. Gollner, F. Linseis, J. Kita, R. Moos
{"title":"集成质量传感系统的小型差示扫描量热计:第一步","authors":"Johanna Distler, T. Wöhrl, R. Werner, Michaela Gerlach, M. Gollner, F. Linseis, J. Kita, R. Moos","doi":"10.5194/jsss-12-9-2023","DOIUrl":null,"url":null,"abstract":"Abstract. In this paper, the first steps towards integrating a mass sensing system\ninto an existing miniaturized ceramic DSC (differential scanning\ncalorimetry) chip are presented. A vibration setup is developed based on the mass-dependent change in frequency of the DSC chip as an oscillating\ncantilever. A simulation model reveals that the resolution of the\nmeasurement can be improved by reducing the chip thickness. In this study,\ndifferent measurement methods (acoustic, optical, and piezoresistive) are\ninvestigated. Three complete measurement systems are set up and evaluated\nwith regard to their integration in the DSC chip. All presented measurement\nmethods show promising results and already allow mass measurements with a\nresolution of 100 µg.\n","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":" ","pages":""},"PeriodicalIF":0.8000,"publicationDate":"2023-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps\",\"authors\":\"Johanna Distler, T. Wöhrl, R. Werner, Michaela Gerlach, M. Gollner, F. Linseis, J. Kita, R. Moos\",\"doi\":\"10.5194/jsss-12-9-2023\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract. In this paper, the first steps towards integrating a mass sensing system\\ninto an existing miniaturized ceramic DSC (differential scanning\\ncalorimetry) chip are presented. A vibration setup is developed based on the mass-dependent change in frequency of the DSC chip as an oscillating\\ncantilever. A simulation model reveals that the resolution of the\\nmeasurement can be improved by reducing the chip thickness. In this study,\\ndifferent measurement methods (acoustic, optical, and piezoresistive) are\\ninvestigated. Three complete measurement systems are set up and evaluated\\nwith regard to their integration in the DSC chip. All presented measurement\\nmethods show promising results and already allow mass measurements with a\\nresolution of 100 µg.\\n\",\"PeriodicalId\":17167,\"journal\":{\"name\":\"Journal of Sensors and Sensor Systems\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":0.8000,\"publicationDate\":\"2023-01-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Sensors and Sensor Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.5194/jsss-12-9-2023\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Sensors and Sensor Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5194/jsss-12-9-2023","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0

摘要

摘要本文介绍了将质量传感系统集成到现有微型陶瓷DSC(差示扫描量热法)芯片中的第一步。基于DSC芯片作为振荡悬臂的质量相关频率变化,开发了一种振动装置。仿真模型表明,减小切屑厚度可以提高测量的分辨率。在这项研究中,研究了不同的测量方法(声学、光学和压阻)。建立了三个完整的测量系统,并对其在DSC芯片中的集成进行了评估。所有提出的测量方法都显示出有希望的结果,并且已经允许质量测量,其分辨率为100 µg。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps
Abstract. In this paper, the first steps towards integrating a mass sensing system into an existing miniaturized ceramic DSC (differential scanning calorimetry) chip are presented. A vibration setup is developed based on the mass-dependent change in frequency of the DSC chip as an oscillating cantilever. A simulation model reveals that the resolution of the measurement can be improved by reducing the chip thickness. In this study, different measurement methods (acoustic, optical, and piezoresistive) are investigated. Three complete measurement systems are set up and evaluated with regard to their integration in the DSC chip. All presented measurement methods show promising results and already allow mass measurements with a resolution of 100 µg.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems INSTRUMENTS & INSTRUMENTATION-
CiteScore
2.30
自引率
10.00%
发文量
26
审稿时长
23 weeks
期刊介绍: Journal of Sensors and Sensor Systems (JSSS) is an international open-access journal dedicated to science, application, and advancement of sensors and sensors as part of measurement systems. The emphasis is on sensor principles and phenomena, measuring systems, sensor technologies, and applications. The goal of JSSS is to provide a platform for scientists and professionals in academia – as well as for developers, engineers, and users – to discuss new developments and advancements in sensors and sensor systems.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信