{"title":"基于扫描电子显微镜和运动摄影测量结构的三维粒子计量概念","authors":"Vipin N Tondare","doi":"10.6028/jres.125.014","DOIUrl":null,"url":null,"abstract":"<p><p>Scanning electron microscopy (SEM) has been frequently used for size and shape measurements of particles. SEM images offer two-dimensional (2D) information about a particle's lateral dimensions. Unfortunately, information about the particle's three-dimensional (3D) size and shape remains unavailable. To resolve this issue, I propose a new concept in SEM: 3D particle metrology obtained by applying structure-from-motion (SfM) algorithms to multiple rotational SEM images of particles deposited onto a cylindrical substrate to generate a 3D model from which size and shape information can be extracted. Particles can have any size that is suitable for SEM imaging. SEM images of the sample can be acquired from 0° to 360° using a rotational-tip SEM substage. Here, I will discuss the concept and, for clarity, illustrate it with aquarium gravel particles that are glued onto a craft roll and imaged optically before generating the 3D model of that handmade craft. Future work will include the experimental SEM realization, as well as further development of the SfM algorithms. In my view, this proposed concept may become an integral part of SEM-based particle metrology.</p>","PeriodicalId":54766,"journal":{"name":"Journal of Research of the National Institute of Standards and Technology","volume":null,"pages":null},"PeriodicalIF":1.3000,"publicationDate":"2020-04-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9017872/pdf/","citationCount":"0","resultStr":"{\"title\":\"A Concept for Three-Dimensional Particle Metrology Based on Scanning Electron Microscopy and Structure-from-Motion Photogrammetry.\",\"authors\":\"Vipin N Tondare\",\"doi\":\"10.6028/jres.125.014\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Scanning electron microscopy (SEM) has been frequently used for size and shape measurements of particles. SEM images offer two-dimensional (2D) information about a particle's lateral dimensions. Unfortunately, information about the particle's three-dimensional (3D) size and shape remains unavailable. To resolve this issue, I propose a new concept in SEM: 3D particle metrology obtained by applying structure-from-motion (SfM) algorithms to multiple rotational SEM images of particles deposited onto a cylindrical substrate to generate a 3D model from which size and shape information can be extracted. Particles can have any size that is suitable for SEM imaging. SEM images of the sample can be acquired from 0° to 360° using a rotational-tip SEM substage. Here, I will discuss the concept and, for clarity, illustrate it with aquarium gravel particles that are glued onto a craft roll and imaged optically before generating the 3D model of that handmade craft. Future work will include the experimental SEM realization, as well as further development of the SfM algorithms. In my view, this proposed concept may become an integral part of SEM-based particle metrology.</p>\",\"PeriodicalId\":54766,\"journal\":{\"name\":\"Journal of Research of the National Institute of Standards and Technology\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.3000,\"publicationDate\":\"2020-04-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9017872/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Research of the National Institute of Standards and Technology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.6028/jres.125.014\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"2020/1/1 0:00:00\",\"PubModel\":\"eCollection\",\"JCR\":\"Q3\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Research of the National Institute of Standards and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.6028/jres.125.014","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2020/1/1 0:00:00","PubModel":"eCollection","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
A Concept for Three-Dimensional Particle Metrology Based on Scanning Electron Microscopy and Structure-from-Motion Photogrammetry.
Scanning electron microscopy (SEM) has been frequently used for size and shape measurements of particles. SEM images offer two-dimensional (2D) information about a particle's lateral dimensions. Unfortunately, information about the particle's three-dimensional (3D) size and shape remains unavailable. To resolve this issue, I propose a new concept in SEM: 3D particle metrology obtained by applying structure-from-motion (SfM) algorithms to multiple rotational SEM images of particles deposited onto a cylindrical substrate to generate a 3D model from which size and shape information can be extracted. Particles can have any size that is suitable for SEM imaging. SEM images of the sample can be acquired from 0° to 360° using a rotational-tip SEM substage. Here, I will discuss the concept and, for clarity, illustrate it with aquarium gravel particles that are glued onto a craft roll and imaged optically before generating the 3D model of that handmade craft. Future work will include the experimental SEM realization, as well as further development of the SfM algorithms. In my view, this proposed concept may become an integral part of SEM-based particle metrology.
期刊介绍:
The Journal of Research of the National Institute of Standards and Technology is the flagship publication of the National Institute of Standards and Technology. It has been published under various titles and forms since 1904, with its roots as Scientific Papers issued as the Bulletin of the Bureau of Standards.
In 1928, the Scientific Papers were combined with Technologic Papers, which reported results of investigations of material and methods of testing. This new publication was titled the Bureau of Standards Journal of Research.
The Journal of Research of NIST reports NIST research and development in metrology and related fields of physical science, engineering, applied mathematics, statistics, biotechnology, information technology.