动态压力窄带电动微传感器的灵敏度和性能分析

IF 0.8 4区工程技术 Q4 ACOUSTICS

International Journal of Acoustics and Vibration Pub Date : 2020-03-30 DOI:10.20855/ijav.2020.25.11490

M. H. Said, F. Tounsi, L. Rufer, B. Mezghani, L. Francis

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引用次数: 0

摘要

本文介绍了一种MEMS动态微压力传感器的分析和数值模型。在所提出的微传感器设计中使用了两个不同直径的同轴平面电感器。使用有限元分析，对不同膜片厚度的膜片谐振频率和动态位移进行了评估。然后，通过耦合在微传感器操作中起作用的不同物理域，推导出总灵敏度。建立了一个集总元件模型，以研究微传感器的灵敏度，并定义不同谐振频率下的动态性能。该模型表明，当在可听频率范围内操作时，在mV/Pa范围内，在谐振频率附近获得最佳灵敏度，而对于超声频率，灵敏度降至μV/Pa范围。所获得的灵敏度曲线证明，无阻尼电感微传感器可以在较窄的频带内提供较高的压力灵敏度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Sensitivity and Performances Analysis of a Dynamic Pressure Narrow-Band Electrodynamic Micro-Sensor

This paper presents analytic and numerical modelling of a MEMS electrodynamic micro-sensor of dynamic pressure. Two coaxial planar inductors of different diameters are used in the proposed micro-sensor design. Using finite element analysis, the diaphragm resonant frequency and dynamic displacements are evaluated for different diaphragm thicknesses. Then, the total sensitivity is deduced by coupling different physical domains which contribute in the micro-sensor operation. A lumped element model is built in order to study the micro-sensor sensitivity and define the dynamic performance for different resonant frequencies. This model shows that the best sensitivity, within the mV/Pa range, is obtained around the resonant frequency when operation in the audible frequency range, and decreases to the μV/Pa range for ultrasonic frequencies. The obtained sensitivity curves prove that the undamped inductive micro-sensor can offer high pressure sensitivity within a narrow frequency bandwidth.

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来源期刊

International Journal of Acoustics and Vibration ACOUSTICS-ENGINEERING, MECHANICAL

CiteScore

1.60

自引率

10.00%

发文量

审稿时长

12 months

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