用X射线衍射测量涂层厚度

IF 0.3 4区 材料科学 Q4 MATERIALS SCIENCE, CHARACTERIZATION & TESTING
M. Witte
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引用次数: 0

摘要

X射线荧光(XRF)经常用于测量微米范围内的层厚度。但是X射线衍射(XRD)也可以以类似的方式使用,并且提供了通过涂层的晶体结构来区分涂层的益处。因此,可以确定相同元素的不同氧化物层的厚度,例如,Fe衬底上的FeO、Fe3O4和Fe2O3。讨论了这种测量方法。此外,通过合适的样品台,可以以无损的方式测量空间分辨的涂层厚度图。给出了所提出的XRD方法在测量钢上锌涂层厚度方面的应用和验证,并与XRF、辉光放电光谱和光学显微照片的结果进行了比较。此外,使用XRF参考标准以及氮化铁和氧化铁层对该方法进行了测试和验证。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement of coating thickness with X-ray diffraction
X-ray fluorescence (XRF) is frequently used to measure layer thickness in the micrometer range. But also X-ray diffraction (XRD) can be used in a comparable way and offers the benefit to differentiate coating layers by their crystal structure. Thus, the thickness of different oxide layers of the same element can be determined, e.g., FeO, Fe3O4, and Fe2O3 on Fe-substrate. An approach for such measurement is discussed. Furthermore, with a suitable sample stage, a spatially resolved coating thickness map can be measured in a nondestructive way. Applications and validations of the presented XRD method for the measurement of the thickness of zinc coatings on steel are given and compared with results from XRF, glow-discharge optical emission spectroscopy, and optical micrographs. In addition, the methodology was tested and validated using XRF reference standards and iron nitride and iron oxide layers.
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来源期刊
Powder Diffraction
Powder Diffraction 工程技术-材料科学:表征与测试
CiteScore
0.90
自引率
0.00%
发文量
50
审稿时长
>12 weeks
期刊介绍: Powder Diffraction is a quarterly journal publishing articles, both experimental and theoretical, on the use of powder diffraction and related techniques for the characterization of crystalline materials. It is published by Cambridge University Press (CUP) for the International Centre for Diffraction Data (ICDD).
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