基于涡旋相移干涉法的高精度表面轮廓测量

IF 1.8 4区物理与天体物理 Q3 OPTICS

International Journal of Optics Pub Date : 2021-09-02 DOI:10.1155/2021/6937072

Donge Zhao, Chaozheng Jia, Yayun Ma, Xuefeng Yang, Bin Zhang, W. Chu

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引用次数: 5

摘要

根据移相干涉原理和涡旋光束的螺旋相位特性，本文提出了一种以空间光调制器产生的+1阶涡旋光束作为参考光来检测透明物体表面轮廓的方法。研究了空间光调制器的非线性相位调制特性对测量精度的影响。结果表明，非线性相位调制对测量结果有很大影响。然后，校正非线性相位调制特性后，利用初始相位为0、π/2、π和3π/2的涡旋光测量基于Twyman-Green干涉系统的h型薄膜样品。实验结果表明，在理论值为20 nm的情况下，对物体表面轮廓的测量误差为1.146 nm，验证了光学涡旋移相技术用于测量物体表面轮廓的可行性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry

According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the reference light. The influence of the nonlinear phase modulation characteristics of the spatial light modulator on the measurement precision is studied. The results show that nonlinear phase modulation has a great impact on the measurement. Then, the vortex lights with initial phases of 0, π/2, π, and 3π/2 are used to measure the H-type thin film sample based on the Twyman-Green interference system after correcting the nonlinear phase modulation characteristics. The experimental results show that the measurement error of the surface profile to an object with the theoretical value of 20 nm is 1.146 nm, and the feasibility of the optical vortex phase-shifting technique used to measure the surface profile of an object is verified.

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来源期刊

International Journal of Optics Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

3.40

自引率

5.90%

发文量

审稿时长

13 weeks

期刊介绍： International Journal of Optics publishes papers on the nature of light, its properties and behaviours, and its interaction with matter. The journal considers both fundamental and highly applied studies, especially those that promise technological solutions for the next generation of systems and devices. As well as original research, International Journal of Optics also publishes focused review articles that examine the state of the art, identify emerging trends, and suggest future directions for developing fields.