高稳健性的增强型非对称DDSCR用于高压ESD保护

Q3 Engineering

International Journal of Electronics Letters Pub Date : 2021-08-25 DOI:10.1080/21681724.2021.1969435

Yang Wang, Jieyu Li, Weipeng Wei, Pei Cao, Wenmiao Cao

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引用次数: 0

摘要

提出了一种用于双向静电放电(ESD)保护的增强型非对称双向可控硅(EADDSCR)。采用0.18µm双极CMOS DMOS (BCD)工艺制备了ADDSCR和EADDSCR，并使用传输线脉冲测试仪进行了测量。通过在阴极和阳极增加N+注入区，在EADDSCR中形成了新的垂直晶闸管通路，使得EADDSCR的失效电流达到了ADDSCR的两倍，而EADDSCR的面积只增加了一小部分。此外，EADDSCR的FoM可以提高到81.19µA/µm以上。最后，改进后的器件具有更小的电阻，更适合于高压电路应用。

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Enhanced asymmetric DDSCR with high robustness for high-voltage ESD protection

ABSTRACT This paper proposes an enhanced asymmetric dual directional silicon controlled rectifier (EADDSCR) for the applications of bidirectional electrostatic discharge (ESD) protection. The ADDSCR and EADDSCR were prepared in a 0.18 µm Bipolar CMOS DMOS (BCD) process and measured with the transmission line pulsing tester. By adding N+ injection regions in the cathode and anode, a new vertical SCR path is formed in EADDSCR, so that the failure current of EADDSCR can reach twice as much as that of ADDSCR with only a small increase in the area of EADDSCR. Moreover, the FoM of EADDSCR can be increased to more than 81.19 µA/µm. Finally, the improved device possesses a smaller on resistance and is more suitable for high-voltage circuit applications.

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来源期刊

International Journal of Electronics Letters Engineering-Electrical and Electronic Engineering

CiteScore

1.80

自引率

0.00%

发文量

期刊介绍： International Journal of Electronics Letters (IJEL) is a world-leading journal dedicated to the rapid dissemination of new concepts and developments across the broad and interdisciplinary field of electronics. The Journal welcomes submissions on all topics in electronics, with specific emphasis on the following areas: • power electronics • embedded systems • semiconductor devices • analogue circuits • digital electronics • microwave and millimetre-wave techniques • wireless and optical communications • sensors • instrumentation • medical electronics Papers should focus on technical applications and developing research at the cutting edge of the discipline. Proposals for special issues are encouraged, and should be discussed with the Editor-in-Chief.