Application the Ion Beam Sputtering Deposition Technique for the Development of Spin-Wave Structures on Ferroelectric Substrates

The microwave properties of structures in the form of the 2 μm iron-yttrium garnet (YIG) films, grown by the ion beam sputtering deposition method on epitaxially mismatched substrates of ferroelectric ceramics based on lead zirconate titanate (PZT, PbZr0.45Ti0.55O3), are discussed. The obtained structures were formed and pre-smoothed by the ion beam planarization substrates with the use of an anti-diffusion layer of titanium dioxide TiO2. The atomic force microscopy showed that the planarization of the substrates allows for reaching a nanoscale level of roughness (up to 10 nm). The presence of smooth plane–parallel interfaces of YIG/TiO2 and TiO2/PZT is evidenced by scanning electron microscopy performed in focused gallium ion beams. Ferromagnetic resonance spectroscopy revealed a broadening in the absorption line of the ferrite garnet layers in the resonance ≈ 100 Oe. This broadening is associated with the presence of defects caused by the of the ceramic substrate non-ideality. The estimated damping coefficient of spin waves turned out to be ~10−3, which is two orders of magnitude higher than in an ideal YIG single crystal. The YIG/TiO2/PZT structures obtained can be used for the study of spin waves.