多孔和黑硅反射特性的建模

IF 0.5 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Journal of Contemporary Physics (Armenian Academy of Sciences) Pub Date : 2023-07-14 DOI:10.1134/S1068337223020056

G. Y. Ayvazyan

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引用次数: 0

摘要

利用时域有限差分法(FDTD)对具有圆柱体和锥体形式的周期系统的光谱反射特性进行了建模，得到了与多孔硅和黑硅层的形貌相对应的单胞结构。分析了这些特征尺寸为几百纳米的系统的增透性能。研究了反射特性与单晶片几何参数和光线入射角的关系。结果表明，锥型周期系统的抗反射性能优于圆柱型周期系统。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Modelling of the Porous and Black Silicon Reflection Characteristics

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Modelling of the Porous and Black Silicon Reflection Characteristics

The results of FDTD modeling of the spectral reflection characteristics of periodic systems with unit cells in the form of cylinders and cones corresponding to the morphology of the porous and black silicon layer presented. The antireflection behavior of these systems with a characteristic size on the order of several hundreds of nanometers is analyzed. The properties of reflection depending on the geometric parameters of unit cells and the angle of incidence of light rays are investigated. It is shown that periodic systems with cones are superior in antireflection properties to systems with cylinders.

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来源期刊

Journal of Contemporary Physics (Armenian Academy of Sciences) PHYSICS, MULTIDISCIPLINARY-

CiteScore

1.00

自引率

66.70%

发文量

审稿时长

6-12 weeks

期刊介绍： Journal of Contemporary Physics (Armenian Academy of Sciences) is a journal that covers all fields of modern physics. It publishes significant contributions in such areas of theoretical and applied science as interaction of elementary particles at superhigh energies, elementary particle physics, charged particle interactions with matter, physics of semiconductors and semiconductor devices, physics of condensed matter, radiophysics and radioelectronics, optics and quantum electronics, quantum size effects, nanophysics, sensorics, and superconductivity.