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光刻用HfO2和ZrO2纳米颗粒的稳定性和微生物毒性

IF 2 4区 材料科学 Q4 GREEN & SUSTAINABLE SCIENCE & TECHNOLOGY
Green Materials Pub Date : 2019-09-12 DOI:10.1680/JGRMA.18.00056
Jorge Gonzalez-Estrella, J. Field, C. Ober, R. Sierra-Alvarez
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引用次数: 1

摘要

二氧化铪(HfO2)和二氧化锆(ZrO2)纳米颗粒(NPs)作为下一代光刻技术的光刻胶的组成部分受到了人们的关注。在这些NPs表面涂上有机l…
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Stability and microbial toxicity of HfO2 and ZrO2 nanoparticles for photolithography
Hafnium dioxide (HfO2) and zirconium dioxide (ZrO2) nanoparticles (NPs) have gained attention as components of photoresists for next-generation photolithography. Coating of these NPs with organic l...
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来源期刊
Green Materials
Green Materials Environmental Science-Pollution
CiteScore
3.50
自引率
15.80%
发文量
24
期刊介绍： The focus of Green Materials relates to polymers and materials, with an emphasis on reducing the use of hazardous substances in the design, manufacture and application of products.
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