低填充因子32×32 SPAD阵列在光敏区扫描的高分辨率单光子成像

Pub Date : 2023-07-13 DOI:10.1007/s10946-023-10140-y
Hengshuo Guo, Yahui Li, Guilong Gao, Gang Wang, Mengmeng Yue, Chao Ji, Di Wang, Xiaoqiang Feng
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引用次数: 0

摘要

单光子光探测和测距(LiDAR)提供单光子灵敏度和皮秒时间分辨率,在三维(3D)成像应用中得到迅速发展。基于单光子雪崩二极管(SPAD)阵列探测器的激光雷达空间分辨率和成像质量难以提高,因为目前可用的SPAD阵列由于半导体制造工艺的限制,仍然具有较小的阵列尺寸,并且像素周围的功能电路降低了填充因子。在此,我们提出了一种光子高效的激光雷达方法,该方法保证了每个像素的光敏区域与照射在目标上的相应光束光斑之间的耦合关系,并在光敏区域使用1/4视场(FoV)扫描成像。该方法可有效提高基于SPAD阵列探测器的激光雷达系统的空间分辨率。分辨率测试实验表明,在2.3 m的工作距离上,观测到的最佳(横向)分辨率为3.1748 lp/mm,比以往方法提高了10倍以上。三维实验证明,该系统可以实现三维高分辨率单光子成像,在遥感和远程目标识别领域具有一定的应用价值。
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High-Resolution Single-Photon Imaging with a Low-Fill-Factor 32×32 SPAD Array by Scanning in the Photosensitive Area

Single-photon light detection and ranging (LiDAR) provides the single-photon sensitivity and picosecond time resolution, which is rapidly developing in three-dimensional (3D) imaging applications. Spatial resolution and imaging quality of LiDAR based on the single-photon avalanche-diode (SPAD) array detectors are difficult to improve, because currently available SPAD arrays still have small size array, due to the semiconductor manufacturing process limitation, and the functional circuitry around pixels reduces the fill factor. Herein, we propose a photon-efficient LiDAR method that guarantees the coupling relationship between the photosensitive area of each pixel and the corresponding beam spot illuminated on the target and uses 1/4 field of view (FoV) scanning imaging in the photosensitive area. The proposed method can effectively improve the spatial resolution of LiDAR system based on SPAD array detectors. Resolution test experiments show that the best observed (transversal) resolution is 3.1748 lp/mm at a working distance of 2.3 m, over tenfold larger than that of previous methods. Three-dimensional experiments prove that the system can achieve 3D high-resolution single-photon imaging, which is valuable in the fields of remote sensing and long-range target recognition.

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