陡峭亚阈值特性的非对称门控Ge-Si0.7Ge0.3 nHTFET和pHTFET

Q4 Materials Science
S. Tripathi, Sobhit Saxena
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引用次数: 7

摘要

晶体管的小型化对MOSFET结构施加了热限制,这是由于低于20nm技术节点的每单位面积芯片的漏电流和静态功耗的增加。隧道FET有潜力在热极限内将静态功耗降低到设计低于20 nm的技术,从而增加了未来缩放趋势的范围。提出了一种新的非对称Ge-Si0.7Ge0.3异质结隧道FET(HTFET),其源极和漏极的氧化物厚度不同。非对称Ge-Si0.7Ge0.3HTFET具有陡峭的亚阈值特性,在低于1V的工作电压下具有低DIBL和高ION/IOFF电流比。由于Ge和Si的晶格结构相似,所提出的设计可以很容易地制造。在以Pt/HfO2作为栅极接触和氧化物材料的nHTFET中,对于15nm的栅极长度,实现了大于108的ION/IOFF电流比。在OFF状态条件下寄生BJT效应的降低也在相同的情况下实现。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Asymmetric Gated Ge-Si0.7Ge0.3 nHTFET and pHTFET for Steep Subthreshold Characteristics
The miniaturisation of transistors imposes thermal limits on MOSFET structures due to increase in leakage current and static power consumption per unit area of chip below 20 nm technology node. Tunnel FET has potential to reduce static power consumption to design below 20 nm technology within thermal limits thus increases the scope of future scaling trends. A new asymmetric Ge-Si0.7Ge0.3 hetero-junction tunnel FET (HTFET) is proposed with different oxide thickness from source and drain side. The asymmetric Ge-Si0.7Ge0.3 HTFET has steep subthreshold characteristic, low DIBL with high ION/IOFF current ratio for operating voltage less than 1V. The proposed design can be fabricated easily due to the similar lattice structure of Ge and Si. The ION/IOFF current ratio greater than 108 is achieved for gate length of 15 nm in nHTFET having Pt/HfO2 as gate contact and oxide material. The lowering of parasitic BJT effect in OFF state condition is also achieved in the same.
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来源期刊
International Journal of Microstructure and Materials Properties
International Journal of Microstructure and Materials Properties Materials Science-Materials Science (all)
CiteScore
0.70
自引率
0.00%
发文量
27
期刊介绍: IJMMP publishes contributions on mechanical, electrical, magnetic and optical properties of metal, ceramic and polymeric materials in terms of the crystal structure and microstructure. Papers treat all aspects of materials, i.e., their selection, characterisation, transformation, modification, testing, and evaluation in the decision-making phase of product design/manufacture. Contributions in the fields of product, design and improvement of material properties in various production processes are welcome, along with scientific papers on new technologies, processes and materials, and on the modelling of processes.
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