离子等离子体沉积制备纳米异质结构薄膜技术的研究进展

IF 0.7 Q4 PHYSICS, MULTIDISCIPLINARY

Ukrainian Journal of Physics Pub Date : 2023-05-11 DOI:10.15407/ujpe68.3.210

M. T. Normuradov, Sh. T. Khozhiev, K. Dovranov, Kh.T. Davranov, M. Davlatov, F. K. Khollokov

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引用次数: 0

摘要

窄间隙半导体薄膜的研究是与热传感器生产相关的一个非常有前途的领域。在这项工作中，我们考虑了用离子等离子体方法从Ba, Na, Ni, Co, Pd, Mn, P和BaTiO3硅化物中获得薄膜涂层的可能性。研究了金属硅化物和BaTiO3在晶体硅和云母表面制备薄膜涂层及其电子和x射线结构特征。确定了膜层性能与膜层沉积条件的关系。

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Development of Technology for Obtaining Nanosized Heterostructured Films by Ion-Plasma Deposition

The study of films containing narrow-gap semiconductors is a very promising field related to the production of thermal sensors. In this work, we consider the possibility of obtaining the film coatings from silicides of Ba, Na, Ni, Co, Pd, Mn, and P and BaTiO3 using ionplasma methods. The production of film coatings from metal silicides and BaTiO3 on the surface of crystalline silicon and mica and their electronic and X-ray structural characteristics are studied. The dependence of the properties of film coatings on the conditions of the film deposition is determined.

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来源期刊

Ukrainian Journal of Physics PHYSICS, MULTIDISCIPLINARY-

CiteScore

1.20

自引率

20.00%

发文量

244

期刊介绍： Ukrainian Journal of Physics is the general physics edition of the Department of Physics and Astronomy of the National Academy of Sciences of Ukraine. The journal publishes original papers and reviews in the fields of experimental and theoretical physics.